- Proceeding Paper
Aerosol/Ink Jet Printing Technology for High-Temperature MEMS Sensors
- Alexey A. Vasiliev,
- Anton V. Nisan and
- Nikolay N. Samotaev
In this work we present the results on the application of additive technology that is aerosol and ink jet technique for the fabrication of high-temperature metal oxide gas sensors. The application of thin (12 μm) alumina membrane, aerosol jet printin...