- Proceeding Paper
Screen-Printed Microcantilevers for Environmental Sensing
- Simon Grall,
- Hélène Debéda,
- Isabelle Dufour and
- Vincent Aubry
This work investigates different geometries for fully screen-printed self-actuated self-readout microcantilevers made using a sacrificial layer process. The microcantilevers are made of PZT sandwiched between two gold electrodes. Q-factors as high as...

