- Review
Multiscale Models of CVD Process: Review and Prospective
- Yu Tian,
- Zefan Yan,
- Lin Jiang,
- Rongzheng Liu,
- Bing Liu,
- Youlin Shao,
- Xu Yang and
- Malin Liu
Chemical vapor deposition (CVD) is a crucial technique in the preparation of high-quality thin films and coatings, and is widely used in various industries including semiconductor, optics, and nuclear fuel, due to its operation simplicity and high gr...