- Article
Charge Storage and Reliability Characteristics of Nonvolatile Memory Capacitors with HfO2/Al2O3-Based Charge Trapping Layers
- Dencho Spassov,
- Albena Paskaleva,
- Elżbieta Guziewicz,
- Wojciech Wozniak,
- Todor Stanchev,
- Tsvetan Ivanov,
- Joanna Wojewoda-Budka and
- Marta Janusz-Skuza
Flash memories are the preferred choice for data storage in portable gadgets. The charge trapping nonvolatile flash memories are the main contender to replace standard floating gate technology. In this work, we investigate metal/blocking oxide/high-k...