Spectrally selective detection is of crucial importance for diverse modern spectroscopic applications such as multi-wavelength pyrometry, non-dispersive infrared gas sensing, biomedical analysis, flame detection, and thermal imaging. This paper repor...
Short-range MEMS-based (Micro Electronical Mechanical System) LiDAR provides precise point cloud datasets for rock fragment surfaces. However, there is more vibrational noise in MEMS-based LiDAR signals, which cannot guarantee that the reconstructed...
This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lamé-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 n...
In this paper, a miniaturized weighing cell that is based on a micro-electro-mechanical-system (MEMS) is discussed. The MEMS-based weighing cell is inspired by macroscopic electromagnetic force compensation (EMFC) weighing cells and one of the crucia...
Detection of thermal activities of biological cells is important for biomedical and pharmaceutical applications because these activities are closely associated with the conformational change processes. Calorimetric measurements of biological systems...
In recent years, tunable metamaterials have attracted intensive research interest due to their outstanding characteristics, which are dependent on the geometrical dimensions rather than the material composition of the nanostructure. Among tuning appr...
Implantable biosensing is attractive for both medical monitoring and diagnostic applications. It is possible to monitor phenomena such as physical loads on joints or implants, vital signs, or osseointegration in vivo and in real time. Microelectromec...
In this paper, we examine the effect of changing the temperature points on MEMS-based inertial sensor random error. We collect static data under different temperature points using a MEMS-based inertial sensor mounted inside a thermal chamber. Rigorou...
Aircraft engines are regularly inspected with borescopes to detect faults at an early stage and maintain airworthiness. A critical part of this inspection process is accurately measuring any detected damage to determine whether it exceeds allowable l...
Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. Th...
Proper monitoring of seismic risk and reliable evaluation of destress blasting efficiency requires a well-developed seismic network surrounding the analyzed area. Unfortunately, the construction of a dense seismic monitoring system using standard typ...
Asset integrity and predictive maintenance models require field data for an accurate assessment of an asset’s condition. Historically these data collected periodically in the field by technicians using portable units. The significant investment...
We propose and experimentally demonstrate a compact design for membrane-supported wavelength-selective infrared (IR) bolometers. The proposed bolometer device is composed of wavelength-selective absorbers functioning as the efficient spectroscopic IR...
This paper presents a micro-electromechanical systems (MEMS)-based integrated triaxial electrochemical seismometer, which can detect three-dimensional vibration. By integrating three axes, the integrated triaxial electrochemical seismometer is charac...
In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) sp...
As a critical component of substations, the substation frames are characterized by significant height and span, which presents substantial challenges and risks in conducting dynamic response tests using traditional sensors. To simplify these difficul...
Accurate gas analysis plays a critical role in aerospace missions, including spacecraft safety assurance, crew health monitoring, and deep-space scientific exploration. Although conventional gas chromatography (GC) techniques are well established, th...
Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The resp...
Micro-electromechanical-systems (MEMS) based sensors are used for monitoring the state of machines in condition-based maintenance tasks. This approach is applied at tram depots for the purpose of identifying faulty wheels on trams in order to elimina...
The gasflow created by a minaturized dielectric barrier discharge (DBD) plasma actuator is measured by a MEMS-based thermal conductivity gas sensor giving an indication of flow velocity and flow direction. The possiblity of several sensors in a small...
Increasing world-wide energy use and growing population growth presents a critical need for enhanced energy efficiency and sustainability. One method to address this issue is via waste heat scavenging. In this approach, thermal energy that is normall...
Micro-electromechanical systems (MEMS) technology-based sensors have found diverse fields of application due to the advancement in semiconductor manufacturing technology, which produces sensitive, low-cost, and powerful sensors. Due to the fabricatio...
Attitude and heading reference system (AHRS) is the term used to describe a rigid body’s angular orientation in three-dimensional space. This paper describes an AHRS determination and control system developed for navigation systems by integrating gyr...
Subgrade collapse threatens coastal infrastructure under harsh environments, where deterioration accelerates deformation and failure risk. Accurate prediction is essential, yet traditional monitoring suffers from low informatization and delayed respo...
Lakes are complex ecosystems affected by various anthropogenic influences, including vessel-induced waves. Detecting these waves by a micro-electro-mechanical system (MEMS)-based inertial measurement unit (IMU) equipped on a buoy-based monitoring sys...
Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a f...
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to...
Inertial Measurement Units are widely used in various applications and, hardware-wise, they primarily consist of a tri-axial accelerometer and a tri-axial gyroscope. For low-end commercial employments, the low cost of the device is crucial: this make...
This article describes the innovative use of an advanced annotation tool designed specifically for creating datasets tailored to MEMS (Micro-Electro-Mechanical Systems) sensor systems for the intelligent transportation domain. By optimizing the data...
This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membran...
This paper introduces a cost-effective, high-performance approach to achieving wafer level vacuum packaging (WLVP) for MEMS-based uncooled infrared sensors. Reliable and hermetic packages for MEMS devices are achieved using a cap wafer that is formed...
Microelectromechanical system (MEMS)-based piezoelectric energy harvesting (PEH) devices can convert the mechanical vibrations of their surrounding environment into electrical energy for low-power sensors. This electrical energy is amplified when the...
Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have...
The micro-electro-mechanical-system (MEMS) inertial measurement unit (IMU) has been widely used in the field of inertial navigation due to its small size, low cost, and light weight, but aligning MEMS IMUs remains a challenge for researchers. MEMS IM...
Three-dimensional structures of microelectro-mechanical systems (MEMS)-based Ge waveguide on a Si beam were fabricated for dynamic tuning of the fundamental absorption edge of Ge by external stressing. The application of various amounts of external f...
It is commonly known that the performance of an electrostatic microelectromechanical system (MEMS) device is limited to a specific range of the full gap distance due to the inherited “pull-in instability” phenomenon. In this work, we desi...
Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on&rd...
A new scheme presents MEMS-based LiDAR with synchronized dual-laser beams for detection range enhancement and precise point-cloud data without using higher laser power. The novel MEMS-based LiDAR module uses the principal laser light to build point-c...
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation...
The conventional temperature drift error (TDE) compensation model cannot decouple temperature dependence of Si-based materials because temperature correlated quantities (TCQ) have not been obtained comprehensively, and Micro-Electro-Mechanical System...
The mechatronic design approach to robotics deploys, inter alia, widely available mechanical design engineering tools that, together with standard production techniques, allow the accurate quantification of the system’s mass properties. While t...
Calorimeters, which can be used for rapid thermal characterization of biomolecules, are getting intense attention in drug development. This paper presents a novel MEMS-based differential scanning calorimeter (DSC) for direct thermal characterization...
This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positio...
Obtaining precise attitude information is essential for aircraft navigation and control. This paper presents the results of the attitude determination using an in-house designed low-cost MEMS-based flight information measurement unit. This study prop...
The continuous measurements of vital signs (body temperature, blood pressure, pulse wave, and respiration rate) are important in many applications across various fields, including healthcare and sports. To realize such measurements, wearable devices...
Integration of Global Positioning System (GPS) and Inertial Navigation System (INS) integrated system involves nonlinear motion state and measurement models. However, the extended Kalman filter (EKF) is commonly used as the estimation filter, which m...
In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph...
As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, sm...
A microstructure beam is one of the fundamental elements in MEMS devices like cantilever sensors, RF/optical switches, varactors, resonators, etc. It is still difficult to precisely predict the performance of MEMS beams with the current available sim...
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator...
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