An Improved Passivity-based Control of Electrostatic MEMS Device
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Mechatronics Engineering Department, School of Applied Technical Sciences, German Jordanian University, Amman 11180, Jordan
2
IEEE Member, Piscataway, NJ 08854, USA
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(7), 688; https://doi.org/10.3390/mi11070688
Received: 17 June 2020
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Revised: 12 July 2020
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Accepted: 13 July 2020
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Published: 16 July 2020
(This article belongs to the Section E：Engineering and Technology)
It is commonly known that the performance of an electrostatic microelectromechanical system (MEMS) device is limited to a specific range of the full gap distance due to the inherited “pull-in instability” phenomenon. In this work, we design a controller to extend the stabilization range of an electrostatic MEMS device and to enhance its performance. The interconnection and damping assignment-passivity based control (IDA-PBC) method is used and the controller design involves coordinate transformations and a coupling between the mechanical and electrical subsystems of the device. The method deploys a design of a speed observer to estimate the speed, which cannot be directly measured by sensors. The effectiveness of the dynamical controller is verified via numerical simulations; it is evident by the extended travel range of the parallel plates as well as the improved performance of the plates, even with a naturally lighter damping ratio.
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MDPI and ACS Style
Ryalat, M.; Salim Damiri, H.; ElMoaqet, H.; AlRabadi, I. An Improved Passivity-based Control of Electrostatic MEMS Device. Micromachines 2020, 11, 688. https://doi.org/10.3390/mi11070688
AMA Style
Ryalat M, Salim Damiri H, ElMoaqet H, AlRabadi I. An Improved Passivity-based Control of Electrostatic MEMS Device. Micromachines. 2020; 11(7):688. https://doi.org/10.3390/mi11070688
Chicago/Turabian StyleRyalat, Mutaz, Hazem Salim Damiri, Hisham ElMoaqet, and Imad AlRabadi. 2020. "An Improved Passivity-based Control of Electrostatic MEMS Device" Micromachines 11, no. 7: 688. https://doi.org/10.3390/mi11070688
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