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Open AccessArticle

MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

1
Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Ibaraki 305-8564, Japan
2
Graduate School of Information Science and Technology, The University of Tokyo, Tokyo 113-8656, Japan
3
Department of Intelligent Robotics, Toyama Prefectural University, Toyama 939-0398, Japan
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(4), 1052; https://doi.org/10.3390/s20041052
Received: 29 January 2020 / Revised: 9 February 2020 / Accepted: 13 February 2020 / Published: 15 February 2020
(This article belongs to the Section Physical Sensors)
This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above a vessel of a subject, the pulse wave of the subject causes the membrane to deform, leading to a change in the chamber pressure. This pressure change results in bending of the cantilever and change in the resistance of the cantilever, hence the pulse wave of the subject can be measured by monitoring the resistance of the cantilever. In this paper, we report the sensor design and fabrication, and demonstrate the measurement of the pulse wave using the fabricated sensor. Finally, measurement of the pulse wave velocity (PWV) is demonstrated by simultaneously measuring pulse waves at two points using the two fabricated sensor devices. Furthermore, the effect of breath holding on PWV is investigated. We showed that the proposed sensor can be used to continuously measure the PWV for each pulse, which indicates the possibility of using the sensor for continuous blood pressure measurement. View Full-Text
Keywords: pulse wave; pulse wave velocity; MEMS; piezoresistive; cantilever pulse wave; pulse wave velocity; MEMS; piezoresistive; cantilever
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Nguyen, T.-V.; Mizuki, Y.; Tsukagoshi, T.; Takahata, T.; Ichiki, M.; Shimoyama, I. MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever. Sensors 2020, 20, 1052.

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