Optical MEMS, Volume II
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".
Deadline for manuscript submissions: closed (31 December 2020) | Viewed by 94687
Special Issue Editors
Interests: MOEMS; micromirror arrays; MOEMS characterization; astronomical instrumentation; spectrographs; spectro-imagers; space optical instrumentation; universe observation; earth observation
Special Issues, Collections and Topics in MDPI journals
Interests: MEMS; CMOS-MEMS sensors; micromirrors; microactuators; piezoelectric MEMS microspeakers; pMUTs; photoacoustic microscopy; optical endomicroscopy
Special Issues, Collections and Topics in MDPI journals
2. Department of Biomedical Engineering, Faculty of Engineering King Mongkut’s Institute of Technology Ladkrabang (KMITL), Bangkok 10520, Thailand
Interests: MEMS; cancer; molecular imaging; optical microscopy; nanotechnology
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Special Issue Information
Dear Colleagues,
Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that enconomy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time span, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers have demanded large-port optical cross connects (OXCs), autonous driving have looked for miniature LiDAR, and virtual reality/augumented reality (VR/AR) have demanded tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.
Prof. Huikai Xie
Prof. Frederic Zamkotsian
Prof. Wibool Piyawattanametha
Guest Editors
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Keywords
- micromirrors
- microlenses
- tunable lenses
- metalenses
- microgratings
- microbolometers
- endomicroscopy
- microspectrometers
- beam steering
- optical phased arrays
- optical switches
- VOA
- micro-LiDAR
- OXC
- DMD
- optical MEMS sensors
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Related Special Issues
- Optical MEMS, Volume III in Micromachines (8 articles)
- Optical MEMS in Micromachines (14 articles)