Special Issue "Optical MEMS, Volume II"

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: 31 January 2020.

Special Issue Editors

Prof. Huikai Xie
E-Mail Website
Guest Editor
Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611, USA
Interests: microsensors; microactuators; inertial sensors; gyroscopes; CMOS MEMS; optical MEMS; optical endoscopic imaging; micro-spectrometers and micro-LIDAR
Special Issues and Collections in MDPI journals
Prof. Frederic Zamkotsian
E-Mail
Guest Editor
Aix Marseille Univ, CNRS, CNES, LAM, Laboratoire d’Astrophysique de Marseille
Interests: MOEMS; micromirror arrays; MOEMS characterization; astronomical instrumentation; spectrographs; spectro-imagers; space optical instrumentation; universe observation; earth observation
Special Issues and Collections in MDPI journals
Prof. Wibool Piyawattanametha
E-Mail Website
Co-Guest Editor
1. Advanced Imaging Research Center, Department of Biomedical Engineering, Faculty of Engineering King Mongkut’s Institute of Technology Ladkrabang (KMITL), Bangkok 10520, Thailand
2. Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48823, USA
Interests: MEMS; cancer; molecular imaging; optical microscopy; nanotechnology

Special Issue Information

Dear Colleagues,

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that enconomy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time span, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers have demanded large-port optical cross connects (OXCs), autonous driving have looked for miniature LiDAR, and virtual reality/augumented reality (VR/AR) have demanded tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.

Prof. Huikai Xie
Prof. Frederic Zamkotsian
Prof. Wibool Piyawattanametha
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All papers will be peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micromirrors
  • microlenses
  • tunable lenses
  • metalenses
  • microgratings
  • microbolometers
  • endomicroscopy
  • microspectrometers
  • beam steering
  • optical phased arrays
  • optical switches
  • VOA
  • micro-LiDAR
  • OXC
  • DMD
  • optical MEMS sensors

Published Papers (2 papers)

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Research

Open AccessArticle
Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs
Micromachines 2019, 10(10), 693; https://doi.org/10.3390/mi10100693 - 12 Oct 2019
Abstract
Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes [...] Read more.
Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al / SiO 2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50 150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001 °/h. Full article
(This article belongs to the Special Issue Optical MEMS, Volume II)
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Open AccessArticle
External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
Micromachines 2019, 10(10), 667; https://doi.org/10.3390/mi10100667 - 30 Sep 2019
Abstract
An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it [...] Read more.
An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the overall width beyond the mirror plate, and (2) increases the maximum rotation angle. The micromirror has two external electromagnets underneath an FPCB structure (two torsion beams and a middle seat) with two moving PM discs attached to the back and a metal-coated mirror plate bonded to the front of the FPCB middle seat. Modeling and simulation were introduced, and the prototype was fabricated and tested to verify the design. The achieved performance was better than that of the previous design: a maximum resonant rotation angle of 62° (optical) at a driving voltage of ±3 V with a frequency of 191 Hz, the required extra width beyond the mirror plate was 6 mm, and an aperture of 8 mm × 5.5 mm with a roughness of <10 nm and a flatness of >10 m (ROC, radius of curvature). The previous FPCB micromirror’s performance was: strain limited maximum rotation angle was 40° (optical), the extra width beyond the mirror plate was 14.7 mm, and had an aperture of 4 mm × 4 mm with a similar roughness and flatness. Full article
(This article belongs to the Special Issue Optical MEMS, Volume II)
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