Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Zhu, Yusi; Zhao, Zhan; Fang, Zhen; Du, Lidong

doi:10.3390/mi12111361

Open AccessReview

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

¹

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

²

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

^*

Author to whom correspondence should be addressed.

Micromachines 2021, 12(11), 1361; https://doi.org/10.3390/mi12111361

Submission received: 7 September 2021 / Revised: 15 October 2021 / Accepted: 27 October 2021 / Published: 4 November 2021

(This article belongs to the Special Issue New Advances in Micromachined Resonators)

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Abstract

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.

Keywords: dual-resonator-based (DRB) MEMS sensor; multiple-resonator-based (MRB) MEMS sensor; strength-coupled-resonator-based (SCRB) sensor; wave-coupled-resonator-based (WCRB) sensor; uncoupled-resonator-based (UCRB) sensor

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Zhu, Y.; Zhao, Z.; Fang, Z.; Du, L. Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review. Micromachines 2021, 12, 1361. https://doi.org/10.3390/mi12111361

AMA Style

Zhu Y, Zhao Z, Fang Z, Du L. Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review. Micromachines. 2021; 12(11):1361. https://doi.org/10.3390/mi12111361

Chicago/Turabian Style

Zhu, Yusi, Zhan Zhao, Zhen Fang, and Lidong Du. 2021. "Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review" Micromachines 12, no. 11: 1361. https://doi.org/10.3390/mi12111361

APA Style

Zhu, Y., Zhao, Z., Fang, Z., & Du, L. (2021). Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review. Micromachines, 12(11), 1361. https://doi.org/10.3390/mi12111361

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Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

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