- Article
A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection
- Liqiang Xie,
- Xuezhong Wu,
- Shengyi Li,
- Haoxu Wang,
- Jianbin Su and
- Peitao Dong
Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate s...