- Article
Electrostatic Excitation for the Force Amplification of Microcantilever Sensors
- Ali Shokuhfar,
- Payam Heydari and
- Salman Ebrahimi-Nejad
This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and a...