- Article
Investigation of Intra-Nitride Charge Migration Suppression in SONOS Flash Memory
- Seung-Dong Yang,
- Jun-Kyo Jung,
- Jae-Gab Lim,
- Seong-gye Park,
- Hi-Deok Lee and
- Ga-Won Lee
In order to suppress the intra-nitride charge spreading in 3D Silicon-Oxide-Nitride-Oxide-Silicon (SONOS) flash memory where the charge trapping layer silicon nitride is shared along the cell string, N2 plasma treated on the silicon nitride is propos...