This review summarizes the more-than-25-years of development of the so-called thermionic vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; the energy for its melting is delivered by means of a focused electro...
To improve the low deposition rate of atomic layer deposition (ALD), we introduced filtered cathodic vacuum arc (FCVA) technology for the high-rate deposition of Al2O3 films. The FCVA-Al2O3 process achieved a deposition rate of 15 nm/min, which is ap...
A simulation of magnetic-field-induced ion motion in vacuum arc deposition for the inner surfaces of a tubular workpiece was performed. An auxiliary magnetic field was set to guide the motion of ions inside a pipe, with different magnetic flux densit...
Staphylococcus aureus is a bacterium which people have been in contact with for thousands of years. Its presence often leads to severe disorders of the respiratory and circulatory systems. The authors of this article present a prototype of a textroni...
In the present work, the effectiveness of vacuum deposition technique for obtaining composite thin films based on chitosan-coated magnesium-doped hydroxyapatite Ca10−xMgx(PO4)6 (OH)2 with xMg = 0.025 (MgHApCh) was proved for the first time. The...
The paper presents the study results of CrN/TiN multi-layer coatings, as well as single-layer TiN and CrN coatings on Cr12MoV cold work die steel deposited by the vacuum-arc plasma-assisted method. Three CrN/TiN coatings of 8-, 16-, and 32-layers wer...
Ti-Al-N coatings were deposited on high-speed steel substrates by filtered vacuum arc deposition (FVAD) during evaporation of aluminum and titanium cathodes. Distribution of elements, phase composition, and mechanical properties of Ti-Al-N coatings w...
The proper control of cathode spot motion is the key issue in the application of vacuum arc deposition (VAD). Improving the arc spot discharge requires considering the structure and properties of the deposited films/coatings as well as the deposition...
The paper analyzes the structure and properties of metal, cermet, and ceramic NbMoCrTiAl high-entropy alloy (HEA) coatings formed on solid substrates by plasma-assisted vacuum arc deposition (from multicomponent gas-metal plasma through Nb, Mo, Cr, a...
The hydroxyapatite and copper-doped hydroxyapatite coatings (Ca10−xCux(PO4)6(OH)2; xCu = 0, 0.03; HAp and 3CuHAp) were obtained by the vacuum deposition technique. Then, both coatings were analyzed by the X-ray diffraction (XRD), scanning elect...
In recent years, high-entropy alloys have attracted increasing scientific interest. Due to their promising combination of properties, such as high hardness and high temperature stability, they are attractive for use as tool coatings for machining app...
The thermionic vacuum discharge method is very effective in that the films obtained using this technology are characterised by a very high degree of adhesion, density and purity because the deposition technique is carried out in high, very high or, i...
Polytetrafluoroethylene (PTFE), polyhexafluoropropylene (PHFP) and polychlorotrifluoroethylene (PCTFE) were heated to their decomposition temperature in a high vacuum. The emitted fragments passed an electron cloud, condensed on a substrate and forme...
This critical overview analyzes the relations between deposition conditions and structure for hydrogen-free carbon films, prepared by vacuum arc deposition. The manifold of film structures can be roughly divided into graphitic, nanostructured and amo...
A vacuum-arc pulsed plasma accelerator (APPA) operating at a discharge current of 750 A and a pulse duration of 110 μs with a repetition rate of 5 Hz was employed to deposit thin films and coatings under low- and medium-vacuum conditions. The aim...
We present the experimental results on the fabrication of metal-ceramic coatings by electron-beam evaporation of alumina ceramic and copper powder composites with different fractions of the components (with Cu powder fraction from 0.1 to 20%) pre-sin...
The spectral properties of new boron-containing dyes were studied. One-component (pure dyes) and composite “Alq3+dye” thin films were fabricated using the thermal vacuum deposition method. The positions of the transmission spectra maxima in a one-com...
The optimisation of the specular reflectance of solar collectors is a key parameter to increase the global yield of concentrated solar power (CSP) plants. In this work, the influence of filtered cathodic vacuum arc deposition parameters, particularly...
The functionalization of the aromatic backbone allows the improvement of the electrical properties of acene molecules in the amorphous layered structures of organic thin films. In the present work, we discuss the electric properties of the stable, am...
Most thin-film techniques require a multiple vacuum process, and cannot produce high-coverage continuous thin films with the thickness of a few nanometers on rough surfaces. We present a new ”paradigm shift” non-vacuum process to deposit high-quality...
Organic thin films with smooth surfaces are mandated for high-performance organic electronic devices. Abrupt nucleation and aggregation during film formation are two main factors that forbid smooth surfaces. Here, we report a simple fast cooling (FC)...
We present experimental results on the deposition of dielectric coatings on metal surfaces by electron-beam evaporation of alumina ceramics in nitrogen and oxygen gas medium at the pressures of 5–30 Pa. The feasibility of implementing this appr...
Conventional thin-film processing techniques remain inadequate for obtaining superior dense ceramic thick films. The incompatibility of ceramic films prepared via other methods, such as screen printing, spin coating, and sputtering, is a major obstac...
The preparation of YBCO superconducting films by using metal organic chemical deposition (MOD) involves low-temperature pyrolysis and high-temperature treatment. The former process generally requires the introduction of water vapor and other gases. T...
Since the discovery of ionic liquids (ILs) as a new class of liquid that can survive in a vacuum at room temperature, they have been aimed at being characterized with vacuum analysis techniques and used in vacuum processes for the last two decades. I...
High hardness improves the material’s load-bearing capacity, resulting in the enhancement of tribological properties. However, the high hardness is difficult to achieve for TiAlN coating due to the transformation of the close-packed structure f...
Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gol...
The Aerosol Deposition (AD, also known as gas kinetic spraying or vacuum deposition) method is a rather novel coating process to produce dense thick films directly from dry ceramic (or metal) powders on a variety of substrates without any heat treatm...
For present and future advanced aerospace bearing applications, it is significant and necessary to improve the corrosion resistance of carburized CSS-42L steel. In this study, Cr films of about 1 μm in thickness were fabricated onto carburized CSS...
The general fabrication process for stabilized amorphous selenium (a-Se) detectors is vacuum deposition. The evaporant alloy is typically selenium alloyed with 0.3–0.5%As to stabilize it against crystallization. During the evaporation, fraction...
Although bioceramic materials exhibit good biocompatibilities and bone conductivities, their high brittleness and low toughness properties limit their applications. Zirconia (ZrO2)/resin composites with idealized structures and properties were prepar...
Diamond-like carbon (DLC) films are valued for their high hardness and wear resistance, but their application in harsh environments is limited by high internal stress and poor corrosion resistance. Co-doping with transition metals offers a promising...
The surface hydrophobicity of poly(ε-caprolactone) electrospun scaffolds prevents their interactions with cells and tissue integration. Although plasma treatment of scaffolds enhances their hydrophilicity, this effect is temporary, and the hy...
The preparation of cation-ordered thin films of correlated oxides is of great interest for both fundamental and applied research. The scientific long-term vision is strongly motivated by the perspective of studying electronic correlations in condense...
Conventional Si or SiGe epitaxy via chemical vapor deposition is performed at high temperatures with a large amount of hydrogen gas using silane (SiH4) or dichlorosilane (SiCl2H2) precursors. These conventional precursors show low growth rates at low...
Chemical vapor deposition (CVD) is a highly adaptable manufacturing technique used to fabricate high-quality thin films, making it essential across numerous industries. As materials fabrication processes progress, CVD has advanced to enable the preci...
Replacing conventional electrode materials is one of the most pressing challenges for next-generation lithium-ion batteries since state-of-the-art systems have almost reached their limitations for performance gains. For anodes, ambitious candidates i...
Vacuum cold spraying (VCS) has emerged as an environmentally sustainable method for fabricating ceramic and metal films. A high particle impact velocity is a critical factor in the deposition of metal particles during the VCS process, which can be si...
The results of a study of structure, phase, and chemical compositions of nanostructured (Ti,Zr)N coatings formed by vacuum arc deposition on Ti0.16Pd (wt.%) alloy substrates are reported. The coating composition was varied depending on the quasi-bina...
Perovskite solar cells (PSCs) have emerged as a disruptive photovoltaic technology for aerospace and extreme environment applications, driven by their substantial power-to-weight ratio and mechanical flexibility. However, continuous operation under h...
The article discusses the influence of the thickness of the wear-resistant layer of the Zr-ZrN-(Zr,Al,Si)N nanolayer composite coating on the values of residual stress and the nature of coating wear. The study focused on coatings with wear-resistant...
Titanium oxide films were deposited at room temperature and with no applied bias using a filtered cathodic vacuum arc (FCVA) system in a reactive oxygen environment. The dependence of film growth on two process parameters, the working pressure (Pw) a...
The powder aerosol deposition method (PAD) is a vacuum-based spray coating technology. It allows for production of highly dense coatings at room temperature, especially of brittle-breaking materials. This yields new options for coating substrate mate...
Germanium is an excellent material candidate for various applications, such as field effect transistors and radiation detectors/multijunction solar cells, due to its high carrier mobilities and narrow bandgap, respectively. However, the efficient pas...
In this study, fore-vacuum plasma electron beam sources were used to deposit a few micron-thick boron coatings on A284 and ZrNb1 alloys and modify their surfaces. The coating deposition rate with a continuous 1 kW electron beam that evaporated the bo...
The theoretical mechanism of open-circuit voltages (VOC) in OSCs based on various small molecule organic materials is studied. The structure under investigation is simple planar heterojunction (PHJ) by thermal vacuum evaporation deposition. The vario...
Severe micro-galvanic corrosion in harsh marine environments greatly limits the corrosion resistance of high-strength aluminum alloys. To address this issue, this study employs a filtered cathodic vacuum arc deposition (FCVAD) system to deposit three...
Fibre-reinforced polymers (FRP) have attracted much interest within many industrial fields where the use of 3D printed molds can provide significant cost and time savings in the production of composite tooling. Within this paper, a novel method for t...
Yttria-stabilized zirconia (YSZ), a thermal barrier coating material characterized by low thermal conductivity, is typically deposited via electron beam-physical vapor deposition. Notably, oxygen depletion occurs during this process, causing color ch...
Laser Induced-Thermionic Vacuum Arc (LTVA) technology was used for depositing uniform intermetallic CoNi thin films of 100 nm thickness. LTVA is an original deposition method using a combination of the typical Thermionic Vacuum Arc (TVA) system and a...
of 15