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Article

Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature

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Profactor GmbH, Im Stadtgut A2, 4407 Steyr-Gleink, Austria
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Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstraße 400, 01328 Dresden, Germany
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Advanced Center for Aerospace Technologies (CATEC), C/Wilbur y Orville Wright 19, 41309 La Rinconada, Sevilla, Spain
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C/Goles 26, 41002 Sevilla, Spain
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Departamento de Física Aplicada I, Escuela Politécnica Superior, Universidad de Sevilla, Virgen de África 7, 41011 Sevilla, Spain
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Author to whom correspondence should be addressed.
Academic Editor: Christian Mitterer
Coatings 2021, 11(2), 233; https://doi.org/10.3390/coatings11020233
Received: 31 December 2020 / Revised: 4 February 2021 / Accepted: 10 February 2021 / Published: 15 February 2021
Titanium oxide films were deposited at room temperature and with no applied bias using a filtered cathodic vacuum arc (FCVA) system in a reactive oxygen environment. The dependence of film growth on two process parameters, the working pressure (Pw) and the O2 partial pressure (pO2), is described in detail. The composition, morphological features, crystalline structure, and optical properties of the deposited films were systematically studied by Rutherford Back Scattering (RBS), Scanning Electron Microscopy (SEM), X-Ray diffraction (XRD), Raman Spectroscopy, UV-vis spectroscopy, and spectroscopic ellipsometry. This systematic investigation allowed the identification of three different groups or growth regimes according to the stoichiometry and the phase structure of the titanium oxide films. RBS analysis revealed that a wide range of TiOx stoichiometries (0.6 < × < 2.2) were obtained, including oxygen-deficient, stoichiometric TiO2 and oxygen-rich films. TiO, Ti2O3, rutile-type TiO2, and amorphous TiO2 phase structures could be achieved, as confirmed both by Raman and XRD. Therefore, the results showed a highly versatile approach, in which different titanium oxide stoichiometries and crystalline phases especially suited for diverse optical applications can be obtained by changing only two process parameters, in a process at room temperature and without applied bias. Of particular interest are crystalline rutile films with high density to be used in ultra-high reflectance metal-dielectric multilayered mirrors, and reduced-TiO2 rutile samples with absorption in the visible range as a very promising photocatalyst material. View Full-Text
Keywords: titanium oxide films; filtered cathodic vacuum arc; rutile; optical coatings titanium oxide films; filtered cathodic vacuum arc; rutile; optical coatings
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MDPI and ACS Style

Guillén, E.; Krause, M.; Heras, I.; Rincón-Llorente, G.; Escobar-Galindo, R. Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature. Coatings 2021, 11, 233. https://doi.org/10.3390/coatings11020233

AMA Style

Guillén E, Krause M, Heras I, Rincón-Llorente G, Escobar-Galindo R. Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature. Coatings. 2021; 11(2):233. https://doi.org/10.3390/coatings11020233

Chicago/Turabian Style

Guillén, Elena, Matthias Krause, Irene Heras, Gonzalo Rincón-Llorente, and Ramón Escobar-Galindo. 2021. "Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature" Coatings 11, no. 2: 233. https://doi.org/10.3390/coatings11020233

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