Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes

Dear Colleagues,

Nanoscale materials and devices with precisely defined shape and size down to the sub-10-nm regime can nowadays be fabricated by electron beam induced processes. This includes not only planar structures but also precisely defined and complex freestanding 3D architectures, an area that has recently witnessed major progress. In such focused electron beam induced deposition (FEBID) processes, solid deposits are obtained by electron-induced decomposition of volatile precursor molecules that contain the elements of the targeted material and are dosed onto a surface. However, precise control over the composition of the deposited material is required to tune the physical properties of the nanodevices. Also, novel precursor molecules are needed to extend the range of materials that is accessible by FEBID.

Lately, progress towards an optimal control of FEBID has been achieved by in-depth studies of the underlying physical and chemical processes. Detailed studies of the electron-induced and thermal chemistry inherent in FEBID are the basis for a targeted design and synthesis of novel precursor molecules. They also guide the development of optimized processes for in situ or post-deposition purification of the deposits or contribute to the development of even more advanced approaches based on electron-enhanced atomic layer deposition (EE-ALD), allowing for thickness control with utmost precision.

The relevance of this insight, however, extends beyond FEBID. As highlighted by the recent Marie Skłodowska-Curie Innovative Training Network ELENA, similar reactions, this time triggered by electrons released upon photoabsorption, contribute to the conversion of novel resist materials for extreme ultraviolet lithography (EUVL), a state-of-the-art tool at the forefront of nanofabrication.

This Special Issue invites the leading experts in the fields of electron-induced nanofabrication to submit their novel and original research. It thus aims at highlighting recent progress in fundamental understanding and performance of these highly topical processes.

Prof. Dr. Petra Swiderek
Dr. Ivo Utke
Prof. Dr. Oddur Ingólfsson
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Nanomaterials is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.