- Article
Characterization of a Supersonic Plasma Jet by Means of Optical Emission Spectroscopy
- Ruggero Barni,
- Hanaa Zaka,
- Dipak Pal,
- Irsa Amjad and
- Claudia Riccardi
We discuss an innovative thin film deposition method, Plasma Assisted Supersonic Jet Deposition, which combines the chemistry richness of a reactive cold plasma environment and the assembly control of the film growth allowed by a supersonic jet direc...