An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperatur...
Today, e-textiles have become a fundamental trend in wearable devices. Fabric pressure sensors, as a part of e-textiles, have also received much interest from many researchers all over the world. However, most of the pressure sensors are made of elec...
A novel on-chip integration of pressure plus 2-axis (X/Z) acceleration composite sensors for upgraded production of automobile tire pressure monitoring system (TPMS) is proposed, developed, and characterized. Herein, the X-axis accelerometer is with...
Due to the significant multipath and Doppler effects in the underwater acoustic (UWA) channel, the quality of the received signal is degraded, which seriously affects the performance of UWA communication. The paper proposes a time reversal UWA commun...
This paper proposes a piezoresistive high-temperature absolute pressure sensor based on (100)/(111) hybrid SOI (silicon-on-insulator) silicon wafers, where the active layer is (100) silicon and the handle layer is (111) silicon. The 1.5 MPa ranged se...
Fiber Bragg Grating (FBG) sensors are widely used to measure pressure and temperature. However, when both are subjected to a coupled environment, the Bragg wavelengths influence each other, causing biased measurements if not properly calibrated. Most...
A new fiber pressure sensor is proposed and analyzed in this paper. A commercial arc fusion splicer and pressure-assisted arc discharge technology are used here to fabricate a silica hollow microbubble from a common glass tube with the characteristic...
With the combination of micropumps and flow sensors, highly accurate and secure closed-loop controlled micro dosing systems for liquids are possible. Implementing a single stroke based control mode with piezoelectrically driven micro diaphragm pumps...
A therapeutic glove, which enables medical non-professionals to perform physiotherapeutic gripping and holding movements on patients, would significantly improve the healthcare situation in physiotherapy. The glove aims to detect the orthogonal press...
In recent years, flexible pressure sensors have garnered significant attention. However, the development of large-area, low-cost, and easily fabricated flexible pressure sensors remains challenging. We designed a flexible fiber optic pressure sensor...
The use of biopolymers for realizing economical and eco-friendly triboelectric nanogenerators (TENGs) widens the application prospects of TENGs. Herein, an animal-sourced whey protein isolate (WPI) film, processed and prepared by a simple aqueous sol...
We report a newly developed design/fabrication module with low-cost single-sided “low-stress-silicon-nitride (LS-SiN)/polysilicon (poly-Si)/Al” process for monolithic integration of composite sensors for sensing-network-node applications. A front-s...
This study proposes a new nanostructured conductive polymer synthesis method that can grow the single-crystalline high-density plasma-polymerized nanoparticle structures by enhancing the sufficient nucleation and fragmentation of the pyrrole monomer...
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This paper aims at evaluating the characteristics of the wakes periodically shed by the rotating bars of a spoked-wheel type wake generator installed upstream of a high-speed low Reynolds linear low-pressure turbine blade cascade. Due to the very hig...
In this paper, a low-power and small-area Single Edge Nibble Transmission (SENT) transmitter design is proposed for automotive pressure and temperature complex sensor applications. To reduce the cost and size of the hardware, the pressure and tempera...
Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in bot...
Flexible capacitive pressure sensors have been widely developed to be used in electronic skin, human movement, real-time health monitoring, and human–machine interactions. This paper introduces a Flexible Capacitive Pressure Sensor Array (FCPSA...
In this study, a prototype system was developed as a potential alternative to lockdown measures against the spread of airborne infectious diseases such as COVID-19. The system integrates real-time estimation functions for respiratory flow and mask le...
A full-scale field investigation was performed to evaluate the lateral pressure exerted by fresh concrete on a 6.67 m-high single-sided wall formwork during on-site casting. Five embedded pressure sensors were installed at various elevations to enabl...
Routine blood pressure measurement is important for the early detection of various diseases. Recently, cuffless blood pressure estimation methods that do not require cuff pressurization have attracted attention. In this study, we investigated the eff...
By virtue of their wide applications in transportation, healthcare, smart home, and security, development of sensors detecting mechanical stimuli, which are many force types (pressure, shear, bending, tensile, and flexure) is an attractive research d...
In recent years, electronic skins have been widely studied for human monitoring systems. This research field needs multi-sensing points for large deformation, strong recovery, and mass production methods. Toward these aims, the fabrication of e-fabri...
Resistive pressure sensors are appealing due to having several advantages, such as simple reading mechanisms, simple construction, and quick dynamic response. Achieving a constantly changeable microstructure of sensing materials is critical for the f...
In this paper, a hollow core fiber was spliced with standard single-mode fibers to form a fiber optic gas pressure sensor, and its sensing characteristics with single hole or multi-holes punched on the hollow core fiber with femtosecond laser pulses...
In this paper, a highly monolithic-integrated multi-modality sensor is proposed for intracorporeal monitoring. The single-chip sensor consists of a solid-state based temperature sensor, a capacitive based pressure sensor, and an electrochemical oxyge...
The piezoresistive characteristics of poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS) pressure sensors with inter-digitated (IDE) and cross-point electrode (CPE) structures have been investigated. A small variation of the resistanc...
A biodegradable inductively coupled pressure sensor is presented. Three sensors were fabricated using melt processed biodegradable polymers and electron-beam evaporated magnesium. All the sensors showed similar pressure responses from 0 to 0.2 bar. I...
We have proposed a novel concept of a pressure sensor called electroluminescent pressure sensor (ELPS) based on oxygen quenching of electroluminescence. The sensor was fabricated as an organic light-emitting device (OLED) with phosphorescent dyes who...
Flexible force and pressure sensors are important for assessing the wear comfort of tightly fitting apparel. Their accuracy and repeatability depend on the sensor itself and the contacting surface. Measurements of the contact pressure on soft surface...
Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, red...
Electroosmotic experiments obtain the electroosmotic pressure coefficient of a rock sample by measuring the excitation voltage at both ends of the sample and the pressure difference caused by the excitation voltage. The electroosmotic pressure is ver...
Optical pressure sensors offer the advantages of high sensitivity, immunity to interference, and suitability for use in extreme environments. Based on the defect-immune, unidirectional transmission characteristics of valley photonic crystals (VPCs) a...
Underwater acoustic sensor networks have recently attracted considerable attention as demands on the Internet of Underwater Things (IoUT) increase. In terms of efficiency, it is important to achieve the maximum communication coverage using a limited...
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive s...
Developing flexible, cost-effective, and durable sensors is a key challenge for integrating Cyber–Physical–Human Systems (CPHSs) into smart homes. This paper introduces a flexible pressure sensor array designed for CPHS applications, addr...
Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabrica...
A high sensitivity optical fiber gas pressure sensor based on paralleled Fabry–Pérot interferometers (FPIs) was demonstrated. One micro-cavity FPI is used as a reference FPI (FPI-1) to generate a Vernier effect and the other FPI (FPI-2)...
A piezoresistive electrical bagging material with minimal cost and profile, such as linqstat or velostat, is a good choice for pressure-sensing systems in robotic arm grippers. This paper’s main objective is to examine the performance of a uniq...
Among wearable e-textiles, conductive textile yarns are of particular interest because they can be used as flexible and wearable sensors without affecting the usual properties and comfort of the textiles. Firstly, this study proposed three types of p...
We report a high-resolution fiber optic temperature sensor system based on an air-filled Fabry–Pérot (FP) cavity, whose spectral fringes shift due to a precise pressure variation in the cavity. The absolute temperature can be deduced fro...
Recent advances in flexible pressure sensors have fueled increasing attention as promising technologies with which to realize human epidermal pulse wave monitoring for the early diagnosis and prevention of cardiovascular diseases. However, strict req...
Thermal-resistance temperature sensors generally employ temperature-sensitive materials as active layers, which are always deposited on a flexible substrate to improve flexibility. Such a temperature sensor is usually integrated in wearable devices w...
This study proposes a microfabricated resonant pressure sensor in which a pair of double-ended tuning forks were utilized as resonators where comb electrodes and single-crystal silicon-based piezoresistors were used for electrostatic excitation and p...
This paper presents an ultra-small absolute pressure sensor with a silicon-micromachined TSV backside interconnection for high-performance, high spatial resolution contact pressure sensing, including flexible-substrate applications. By exploiting sil...
Accurate pressure monitoring is crucial for both human body applications and intelligent robotic arms, particularly for whole-body motion monitoring in human–machine interfaces. Conventional wearable electronic devices, however, often suffer fr...
In various domains of material processing, such as surface cleaning and surface treatment, cavitation phenomenon may become an alternative to traditional methods if this phenomenon is well understood. Due to experimental and mathematical difficulties...
This paper presents a capacitive pressure sensor interface circuit design in 180 nm XH018 CMOS technology for an implantable capacitive pressure sensor, which has a wireless power supply and wireless data transfer function. It integrates full-bridge...
Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse...
The article presents the use of barometric sensors to precisely determine the altitude of a flying object. The sensors are arranged in a hexahedral spatial arrangement with appropriately spaced air inlets. Thanks to the solution used, the range of me...
An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dyna...
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