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Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications

1
School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
2
International Research Institute for Multidisciplinary Science, Beihang University, Beijing 100191, China
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Sensors 2016, 16(10), 1660; https://doi.org/10.3390/s16101660
Received: 26 July 2016 / Revised: 25 September 2016 / Accepted: 5 October 2016 / Published: 17 October 2016
(This article belongs to the Section Physical Sensors)
Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1–0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature. View Full-Text
Keywords: pressure sensor; silicon carbide; ultrasonic assisted machining; bonding; harsh environment pressure sensor; silicon carbide; ultrasonic assisted machining; bonding; harsh environment
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MDPI and ACS Style

Jiang, Y.; Li, J.; Zhou, Z.; Jiang, X.; Zhang, D. Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications. Sensors 2016, 16, 1660.

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