The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control
Abstract
:1. Introduction
1.1. Micro Diaphragm Pump
1.2. Miniaturizable Inline Flow Sensor Technologies
1.2.1. Differential Pressure Based (DPB) Flow Sensor
1.2.2. Thermal Flow Sensors
1.3. Flow Control Methods
2. Materials and Methods
2.1. Materials and Equipment
2.1.1. Silicon Micropump
2.1.2. Differential Pressure Based (DPB) Flow Sensor
2.2. Measurement Methods
2.2.1. Static Calibration of Flow Sensors
2.2.2. Single Stroke Calibration Method
3. Results
3.1. Capacitive and Resistive Fluidic Damping
3.2. Transient Single Stroke Measurement
3.3. Single Stroke Based Flow Control Mode
4. Discussion
4.1. Sensor Accuracy at Pulsed Flow
4.2. Flow Control Modes
4.3. Future Investigations
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Sensor Principle | Measurement Velocity |
---|---|
Optical/capacitive flank monitoring | 0.4 ms [42] |
Differential pressure based | <1 ms [27] |
Thermal calorimeter | 40 ms [43] |
Thermal TOF (time-of-flight) | 6–25 ms [44] |
Coriolis | 50–200 ms [45] |
Gravimetric balance | <2 s [46] |
Materials and Equipment | Manufacturer and Model |
---|---|
Silicon micropumps | Fraunhofer EMFT [54,55] |
Differential pressure based (DPB) flow sensor | Fraunhofer EMFT [27] |
Thermal flow sensor | Sensirion LPG10-0500 |
Coriolis mass flow meter | Bronkhorst miniCORI-Flow |
Gravimetric balance | Sartorius 225S |
Frequency generator | Agilent 33120A |
High voltage amplifier | Piezomechanik SVR 150/3 |
Pressure controller | Mensor CPC3000 |
Surface topography measurement | FRT 300 μm sensor |
Analog readout device | NI I/O-Box 6211 |
Actuator | Diaphragm Thickness | Diaphragm Diameter | Piezo Thickness | Piezo Diameter | Piezo Type | Pump Chamber Height |
---|---|---|---|---|---|---|
40 μm | 6.6 mm | 150 μm | 5.6 mm | PIC255 | 3 μm | |
Valves | Flap length | Flap width | Flap thickness | Valve seat length (cubic) | Seal lip width | |
800 μm | 400 μm | 15 μm | 3 00 μm | 6 μm |
Label | Pressure Range | Repeatability and Hysteresis | Nozzle Diameter | Diffuser Diameter | Max. Nozzle Flow | Max. Diffuser Flow |
---|---|---|---|---|---|---|
DPB65μ | 5 psi = 34.5 kPa at 110 mV | ±52 Pa or ±0.17 mV | 65 μm | 60 μm | 270 μL/min | 260 μL/min |
DPB50μ | 5 psi = 34.5 kPa at 110 mV | ±52 Pa or ±0.17 mV | 50 μm | 45 μm | 165 μL/min | 158 μL/min |
Method | Measurement of |
---|---|
(a) Static calibration of flow sensors | Static reference flow vs. sensor voltage |
(b) Dynamic calibration of flow sensors | Stroke volume vs. sensor voltage vs. average reference flow |
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Jenke, C.; Pallejà Rubio, J.; Kibler, S.; Häfner, J.; Richter, M.; Kutter, C. The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control. Sensors 2017, 17, 755. https://doi.org/10.3390/s17040755
Jenke C, Pallejà Rubio J, Kibler S, Häfner J, Richter M, Kutter C. The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control. Sensors. 2017; 17(4):755. https://doi.org/10.3390/s17040755
Chicago/Turabian StyleJenke, Christoph, Jaume Pallejà Rubio, Sebastian Kibler, Johannes Häfner, Martin Richter, and Christoph Kutter. 2017. "The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control" Sensors 17, no. 4: 755. https://doi.org/10.3390/s17040755