Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
1
In.Medica d.o.o., Levicnikova 34, 8310 Sentjernej, Slovenia
2
Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia
*
Author to whom correspondence should be addressed.
Sensors 2012, 12(1), 320-333; https://doi.org/10.3390/s120100320
Received: 24 November 2011
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Revised: 19 December 2011
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Accepted: 19 December 2011
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Published: 29 December 2011
(This article belongs to the Section Physical Sensors)
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a capacitive pressure sensor, which is based on changes of the capacitance values between two electrodes: one electrode is fixed and the other is movable under an applied pressure. The design was primarily focused on low power consumption. Reliable operation in the presence of disturbances, like electromagnetic interference, parasitic capacitances, etc., proved to be contradictory constraints. A piezoresistive ceramic pressure sensor with a high bridge impedance was chosen for use in a wireless pressure-monitoring system and an acceptable solution using energy-harvesting techniques has been achieved. The described solution allows for the integration of a sensor element with an energy harvester that has a printed thick-film battery and complete electronics in a single substrate packaged inside a compact housing.
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Keywords:
energy harvesting; pressure measurement; thick film sensors
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MDPI and ACS Style
Pavlin, M.; Belavic, D.; Novak, F. Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment. Sensors 2012, 12, 320-333. https://doi.org/10.3390/s120100320
AMA Style
Pavlin M, Belavic D, Novak F. Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment. Sensors. 2012; 12(1):320-333. https://doi.org/10.3390/s120100320
Chicago/Turabian StylePavlin, Marko, Darko Belavic, and Franc Novak. 2012. "Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment" Sensors 12, no. 1: 320-333. https://doi.org/10.3390/s120100320
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