- Article
Study on Damage of 4H-SiC Single Crystal through Indentation and Scratch Testing in Micro–Nano Scales
- Peng Chai,
- Shujuan Li,
- Yan Li and
- Xincheng Yin
In this paper, a series of indentation tests in which the maximum normal force ranged from 0.4 to 3.3 N were carried out to determine the fracture toughness of 4H-SiC single crystals. The results indicated that an appropriate ratio of the distance fr...