- Article
Influence of N2/Ar Flow Ratio on the Microstructure and Electrochemical Capacitive Performance of TiN Thin-Film Electrodes for Micro-Supercapacitors
- Jiaxin Tan,
- Lin Yi,
- Min Zhang and
- Suyuan Bai
With the rapid development of the Internet of Things (IoT), micro-energy storage devices face increasing demands for miniaturization, high energy density, and high power density. Owing to their excellent electrical conductivity and mechanical strengt...