3,807 Results Found

Total sputtering yield and spatial distributions of sputtered atoms are important for numerous deposition techniques. We performed SRIM (Stopping and Range of Ions in Matter) simulations to analyze the total sputtering yield and angular distribution...

In-Sn-Zn oxide (ITZO) thin films have been studied as a potential material in flat panel displays due to their high carrier concentration and high mobility. In the current work, ITZO thin films were deposited on glass substrates by high-power impulse...

TiN/TiAlN coatings were deposited on 40Cr steel substrates by DC magnetron sputtering to improve the surface tribological performance of the steel. The influence of sputtering power (80, 100, 120, 140, 160 and 180 W) on coating morphology, phase stru...

Most of the molybdenum (Mo) bilayer films are deposited by direct current (DC) magnetron sputtering at the bottom and the top layer (DC/DC). However, the deposition of Mo bilayer film by radio frequency (RF) Mo bottom layer and DC Mo top layer magnet...

This paper presents the experimental results of high-temperature sputtering of nickel targets by the Gas Injection Magnetron Sputtering (GIMS) technique. The GIMS technique is a pulsed magnetron sputtering technique that involves the generation of pl...

In this work, an integrated multiscale simulation of magnetron sputtering epitaxy was conducted to study the effect of sputtering pressure on the surface micro-topography of sputtered Cu/Si films. Simulation results indicated that, as the sputtering...

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current wa...

The ecofriendly tin selenide (SnSe) is expected to find multiple applications in optoelectronic, photovoltaic, and thermoelectric systems. This work is focused on the thermoelectric properties of thin films. SnSe single crystals exhibit excellent the...

This work critically reviews the evolution of reactive sputtering modeling that has taken place over the last 50 years. The review summarizes the main features of the deposition of simple metal compound films (nitrides, oxides, oxynitrides, carbides,...

Cu_100−xCo_x thin films have been obtained by sputtering (x = 3, 9) and sputter gas aggregation (x = 2.5, 7.5) and subsequent annealing at 400 °C for 1 h. We have studied their structural, magnetic, and magnetotransport properties, both for t...

Sputtering technique involves the use of plasma that locally heats surfaces of substrates during the deposition of atoms or molecules. This modifies the microstructure by increasing crystallinity and the adhesive properties of the substrate. In this...

In this article, we report continuous and large-area molybdenum disulfide (MoS₂) growth on a SiO₂/Si substrate by radio frequency magnetron sputtering (RFMS) combined with sulfurization. The MoS₂ film was synthesized using a two-step method. In the f...

Chromium Nitride (CrN) coatings have widespread utilization across numerous industrial applications, primarily attributed to their excellent properties. Among the different methods for CrN coating synthesis, direct current magnetron sputtering (DCMS)...

Radio frequency (RF) sputtering is a potential medical device coating technology that is commercializable; however, a suitable commercialized target for sputtering the hydroxyapatite (HA) coating onto titanium medical devices is more important. There...

Magnetron Sputter Vacuum Deposition (MSVD) has undergone significant advancements since its inception. This review explores the evolution of MSVD, encompassing its fundamental principles, various techniques (including reactive sputtering, pulsed magn...

A ternary Cr₂AlB₂ phase was deposited as a film using magnetron sputtering. Its anisotropic structure displays both structural and chemical similarities with the nanolaminated MAX phases (M_n+1AX_n (n = 1–3) where M usually is an early transition...

The photometric properties of an radio frequency (RF)-based sputtering plasma source were monitored through optical spectroscopy. The colour of the plasma source was deduced based on conventional chromaticity index analysis and it was compared to the...

Among the vast array of technologies available for surface modification of materials, sputtering emerges as one of the most versatile methods through coating deposition. Included in the family of physical vapor deposition (PVD) techniques, sputtering...

Nano Al films were prepared on AZ31 magnesium alloy samples by DC magnetron sputtering. The effects of sputtering power on the microstructure and corrosion resistance of the Al film were investigated. The results show that the surface of aluminum fil...

Several key sputtering parameters for the deposition of Sc_xAl_1−xN such as target design, sputtering atmosphere, sputtering power, and substrate temperature are reviewed in detail. These parameters serve a crucial role in the ability to deposit...

Sputtering yields of Si have been measured for C₆₀ ions in the energy range from 10 to 540 keV, where the nuclear stopping is dominant, by measuring thickness change of a pre-amorphized layer with conventional Rutherford-backscattering spectroscopy....

Coating growth and mechanical properties of nanolamellar Cr₂AlC coatings at various sputtering power were investigated in the present study. Cr₂AlC coating was deposited on the IN 718 superalloy and (100) Si wafers by DC magnetron sputtering at diffe...

The aim of this work is to determine the influence of medium frequency magnetron sputtering powers on the various properties of hafnium dioxide (HfO₂) thin films. Microstructure observations show that an increase in the sputtering power has a signifi...

This review explores the processes involved in enhancing AlN film quality through various magnetron sputtering techniques, crucial for optimizing performance and expanding their application scope. It presents recent advancements in growing AlN thin f...

The effects of electronic excitations on the ion sputtering of water ice are not well understood even though there is a clear dependence of the sputtering yield on the electronic stopping power of high-energy ions. Ion sputtering of amorphous water i...

The applications of magnetron sputtering technology on the surface coating of fabrics have attracted more and more attention from researchers. Over the past 15 years, researches on magnetron sputtering coated fabrics have been mainly focused on elect...

Bi₂Te₃-based materials are benchmark room-temperature thermoelectrics, widely used in refrigeration, waste heat recovery, and microdevice thermal management. Magnetron sputtering demonstrates significant potential as an effective strategy for the mas...

Triboelectric nanogenerators (TENG) can convert mechanical energy into electricity and exhibit unique advantages in the field of low-frequency and discrete energy harvesting. However, the interfacial state and stability between the triboelectric laye...

High-entropy films (HEFs) are of considerable interest in surface engineering applications due to their superior properties, such as good corrosion resistance, good thermal stability and excellent high temperature oxidation. Recently, the scientific...

In this paper, the radio frequency (RF) magnetron sputtering (MS) method was utilized to fabricate multiple sets of the iron film samples under different sputtering powers. With the help of X-ray diffraction (XRD), scanning electron microscopy (SEM),...

The laterally graded multilayer collimator is a vital part of a high-precision diffractometer. It is applied as condensing reflectors to convert divergent X-rays from laboratory X-ray sources into a parallel beam. The thickness of the multilayer film...

Thin films of titanium dioxide (TiO₂) and titanium (Ti) were deposited onto glass and optical fiber supports through DC magnetron sputtering, and their transmission was characterized with regard to their use in optical fiber-based sensors. Deposition...

For the first time, the effect of Cuprous Oxide (Cu₂O) sputtering power variation on the radio frequency sputtered Copper Chromium Oxide (CuCrO₂) thin films was studied. In this work, the sputtering power of Cr₂O₃ was held constant at 200 W while the...

The performance of supercapacitors is directly influenced by the conductivity of polypyrrole, which serves as the electrode material. In order to balance considerations of cost-effectiveness and conductivity, this study employs magnetron sputtering t...

The high reliability of electroplating through silicon vias (TSVs) is an attractive hotspot in the application of high-density integrated circuit packaging. In this paper, improvements for fully filled TSVs by optimizing sputtering and electroplating...

Face-to-face annealed sputter-deposited aluminum nitride (AlN) templates (FFA Sp-AlN) are a promising material for application in deep-ultraviolet light-emitting diodes (DUV-LEDs), whose performance is directly related to the crystallinity of the AlN...

Magnetic FeGa and FeGaNi films with an in-plane anisotropy were deposited by employing oblique magnetron sputtering. With the increase in oblique angle, the crystallite size of FeGa decreases, which indicates that oblique sputtering can refine the cr...

Thin films of transition metal oxides and oxynitrides have proven highly effective in protecting stainless steels against corrosion in both chemically aggressive environments and biological fluids. In the present work, cerium zirconium oxynitride thi...

Barium titanate (BaTiO₃) is a promising material for silicon-integrated photonics due to its large electro-optical coefficients, low loss, high refractive index, and fast response speed. Several deposition methods have been employed to synthesize BaT...

We present a brief review that highlights the importance of III-Nitride semiconductor compounds according to their structural, compositional, morphological, and optical properties, which have significant applications in new semiconductor devices and...

The growth of epitaxial thin films from the Ruddlesden–Popper series of strontium iridates by magnetron sputtering is analyzed. It was found that, even using a non-stoichiometric target, the films formed under various conditions were consistent...

The fabrication of Sb₂Se₃ thin-film solar cells deposited by a pulsed hybrid reactive magnetron sputtering (PHRMS) was proposed and examined for different growth conditions. The influence of growth temperature and Se pulse period were studied in term...

Niobium nitride (NbN) thin films are crucial materials for various applications, including superconductivity and hard coatings. However, precisely controlling their microstructure and crystal orientation during synthesis remains a challenge. This stu...

Accurate detection of the preload force of tower crane bolts is of great significance for the stable and safe operation of the equipment. The method of contact ultrasonic detection of bolt preload has always been the focus of attention, which can rea...

Titanium nitride (TiN) has mechanical and electrical characteristics applicable for very large scale integration (VLSI) and discrete electronic devices. This study assessed the effect of hydrogen on sputtering growth of TiN on ceramic substrates. Alt...

We summarize the recipes and describe the role of sputtering parameters in producing highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is collated from the analysis of around 80 journal articles that sputtered...

A co-sputtering process for the deposition of Fe_0.8Ga_0.2B alloy magnetostrictive thin films is studied in this paper. The soft magnetic performance of Fe_0.8Ga_0.2B thin films is modulated by the direct-current (DC) sputtering power of an FeGa target a...

This paper investigates how negative substrate bias voltage and sputtering pressure influence tungsten coatings deposited via radiofrequency magnetron sputtering. Increasing the absolute value of negative bias voltage (up to −150 V) of the subs...

Hydrophobic thin films have gained significant attention due to their broad applications in self-cleaning, anti-corrosion, anti-icing, medicine, oil–water separation, and other fields. The target hydrophobic materials can be deposited onto vari...

The effective treatment of the surface electrode is the core technology of an ionic polymer–metal composite (IPMC), and its preparation significantly affects the driving performance of the IPMC. Copper, which is inexpensive and has excellent el...