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Advances in Thin Film Fabrication by Magnetron Sputtering

This special issue belongs to the section “Surface Characterization, Deposition and Modification“.

Special Issue Information

Keywords

  • Magnetron plasma sources
  • Magnetron plasma characterization
  • Pulsed methods of magnetron sputtering
  • Thin functional films
  • Nanocrystalline films

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Published Papers

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Coatings - ISSN 2079-6412