- Review
Recent Development for Ultra-Precision Macro–Micro Dual-Drive System: A Review
- Manzhi Yang,
- Haochen Gui,
- Chuanwei Zhang,
- Shuanfeng Zhao,
- Feiyan Han,
- Meng Dang and
- Bin Zhang
Macro–micro dual-drive technology uses a micro-drive system to compensate for motion errors of a macro-drive system, solving the contradiction between large travel and high-precision motion. Additionally, it has a wide range of applications in...