- Article
A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications
- Zhixin Zhang,
- Ji Liang,
- Daihua Zhang,
- Wei Pang and
- Hao Zhang
Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the to...