Silicon-on-insulator (SOI) wafers are crucial raw materials in the manufacturing process of microelectromechanical systems (MEMS). Residual stresses generated inside the wafers during the fabrication process can seriously affect the performance, reli...
Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a...
An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dyna...
Self-sustained feedback oscillators referenced to MEMS/NEMS resonators have the potential for a wide range of applications in timing and sensing systems. In this paper, we describe a real-time temperature compensation approach to improving the long-t...
The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semico...
Infrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance. This paper presents a multiphysics modeling framework to study the integration of M...
Modern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture...
Wafer-level processed and wafer-level packaged low-cost microelectromechanical system (MEMS) thermal sensors are required for a wide range of Internet of Things (IoT) and wearables applications. Recently, a new generation of uncooled thermal sensors...
Uncooled infrared (IR) sensors, including bolometers, thermopiles, and pyroelectrics, have traditionally dominated the market. Nevertheless, a new innovative technology, dubbed the TMOS sensor, has emerged. It is based on CMOS-SOI-MEMS (complementary...
Silicon windows in wafer-level packaged LWIR sensors suffer ~30% Fresnel reflection per interface, limiting optical throughput and detector sensitivity. We present an end-to-end design, fabrication, and validation framework for CMOS-compatible moth-e...
Despite the development of energy-efficient devices in various applications, microelectromechanical system (MEMS) electrostatic actuators yet require high voltages to generate large displacements. In this respect, electrets exhibiting quasi-permanent...
A silicon-on-insulator (SOI) piezoresistive three-axis acceleration sensor, consisting of four L-shaped beams, two intermediate double beams, two masses, and twelve piezoresistors, was presented in this work. To detect the acceleration vector (ax, ay...
Minimizing conductive heat losses in Micro-Electro-Mechanical-Systems (MEMS) thermal (hot-film) flow sensors is the key to minimize the sensors’ power consumption and maximize their sensitivity. Through a comprehensive review of literature on M...
With the development of the micro electromechanical system (MEMS), which widely adopts micro differential pressure sensors (MDPSs), the demand for high-performance MDPSs had continuously increased. Pressure sensors realized using MEMS technology inte...
This paper presents a piezoresistive differential pressure sensor based on a silicon-on-insulator (SOI) structure for low pressure detection from 0 to 30 kPa. In the design phase, the stress distribution on the sensing membrane surface is simulated,...
The importance and challenges of ethylene detection based on combustion-type low-cost commercial sensors for agricultural and industrial applications are well-established. This work summarizes the significant progress in ethylene detection based on a...
This paper presents the first demonstration and comparison of two identical oscillator circuits employing piezoelectric zinc oxide (ZnO) microelectromechanical systems (MEMS) resonators, implemented on conventional printed-circuit-board (PCB) and thr...
The tensile strength of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based microelectromechanical system (MEMS) device was measured using electrostatic actuation and sensing. SiNWs of about 150 nm diameter and...
Current research in the field of aviation considers actively controlled high-lift structures for future civil airplanes. Therefore, pressure data must be acquired from the airfoil surface without influencing the flow due to sensor application. For ex...
High-precision, low-temperature-sensitive microelectromechanical system (MEMS) capacitive accelerometers are widely used in aerospace, automotive, and navigation systems. An analytical study of the temperature drift of bias (TDB) and temperature drif...
In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile object...
Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by...
In recent years, the immense potential for MEMS devices in the biomedical industry has been understood. It has been determined that, among their many plausible functions, their use may also extend to single human red blood cell diagnostics, whereby b...
Air temperature is an important meteorological parameter and is used for numerous purposes. Air temperature is usually observed using a radiation shield with ventilation, to obtain proper measurements by providing shade from direct solar radiation an...
As a result of their IC compatibility, high acoustic velocity, and high thermal conductivity, aluminum nitride (AlN) resonators have been studied extensively over the past two decades, and widely implemented for radio frequency (RF) and sensing appli...
This study proposes a microfabricated resonant pressure sensor based on electrostatic excitation and low-impedance piezoresistive detection in which a pair of double-ended tuning forks were utilized as resonators for differential outputs. In operatio...
This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the def...
This is a second part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated wi...
This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant...
Cavity silicon on insulator (Cavity-SOI) offers significant design flexibility for microelectromechanical systems (MEMS). Notably, the shape and depth of the cavity can be tailored to specific requirements, facilitating the realization of intricate m...
The growing demand for compact, low-power infrared (IR) sensors necessitates advanced solutions for on-chip spectral selectivity, particularly for integration with Thermal Metal-Oxide-Semiconductor (TMOS) devices. This paper investigates the design a...
While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex...
There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMO...
We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows the generation of large displacements. The DAC consists of electrostatic bending-plate actuators that are connected to a mech...
In this paper we present and discuss two innovative liquid-free SOI sensors for pressure measurements in harsh environments. The sensors are capable of measuring pressures at high temperatures. In both concepts media separation is realized using a...
This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning for...
Ultra-high pressure measurement has significant applications in various fields such as high pressure synthesis of new materials and ultra-high pressure vessel monitoring. This paper proposes a novel ultra-high pressure sensor combining a truncated-co...
MEMS fabrication that is based on the silicon-on-glass (SOG) process requires many steps, including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical mechanical polishing (CMP). The effects of the process parameters of CMP an...
We present the design, fabrication, and experimental characterization of microsystems achieving large and stepwise discrete displacements. The systems consist of electrostatic bending plate actuators linked in a chain with increasing electrode gaps t...
In recent years, tissue engineering with mechanical stimulation has received considerable attention. In order to manipulate tissue samples, there is a need for electromechanical devices, such as constant-force actuators, with integrated deflection me...
Embedded machine learning, TinyML, is a relatively new and fast-growing field of ML, enabling on-device sensor data analytics at low power requirements. This paper presents possible improvements to GMOS, a gas sensor, using TinyML technology. GMOS is...
In this paper, we present different microelectromechanical systems based on electrostatic actuators, and demonstrate their capacity to achieve large and stepwise displacements using a cooperative function of the actuators themselves. To explore this,...
In this paper, the experimental methodology for the single-crystal circular plate deformation measurement and subsequent procedure for the quantitation of its mechanical properties are developed. The procedure is based on a new numerical-analytical s...
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of th...
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectro...
This paper presents a high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging. An approach to maintaining high-vacuum conditions by integrating the MEMS fabrication process with g...
In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing t...
Micro-electro-mechanical systems (MEMS) sensors offer the benefits of compact size, lightweight design, and low cost, which has led to widespread use in consumer electronics, vehicles, healthcare, defense, and communications. As their performance has...
This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners...
The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an N...
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