Next Article in Journal
Love-Mode MEMS Devices for Sensing Applications in Liquids
Next Article in Special Issue
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
Previous Article in Journal
Thermocapillarity in Microfluidics—A Review
Previous Article in Special Issue
Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology
Article Menu

Export Article

Open AccessReview
Micromachines 2016, 7(1), 14;

CMOS MEMS Fabrication Technologies and Devices

Department of Electrical and Computer Engineering, Oakland University, 2200 N. Squirrel Road, Rochester, MI 48309, USA
Academic Editor: Ching-Liang Dai
Received: 31 August 2015 / Revised: 9 November 2015 / Accepted: 15 January 2016 / Published: 21 January 2016
(This article belongs to the Special Issue CMOS-MEMS Sensors and Devices)
Full-Text   |   PDF [4719 KB, uploaded 21 January 2016]   |  


This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered. View Full-Text
Keywords: CMOS (complementary metal-oxide-semiconductor); MEMS (micro-electro-mechanical systems); CMOS MEMS; integration; sensors; actuators CMOS (complementary metal-oxide-semiconductor); MEMS (micro-electro-mechanical systems); CMOS MEMS; integration; sensors; actuators

Graphical abstract

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Qu, H. CMOS MEMS Fabrication Technologies and Devices. Micromachines 2016, 7, 14.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top