Design, Fabrication and Testing of MEMS/NEMS, 2nd Edition

Dear Colleagues,

Recently, micro-electromechanical system (MEMS) technology has demonstrated rapid development and innovative progress, covering a full spectrum of applications from IoT (Internet of Things) to wearable systems. Remarkable advances have contributed to the development of MEMS devices, including physical sensors, chemical sensors, biosensors, optical sensors, RF MEMS and self-power devices, etc., which have great potential to reshape the future.

This Special Issue aims to highlight the recent novel developments in cutting-edge MEMS transducer technologies, including original research articles and topical reviews on material, design and fabrication technologies and novel applications in physical, chemical and biomedical fields, as well as new characterization methods and packaging and microsystem integration solutions. We would like to encourage our colleagues to submit their excellent work to this Special Issue.

The topics of this Special Issue include, but are not limited to, the following:

1. Novel functional MEMS materials;
2. Innovative MEMS mechanical and chemical sensors;
3. Biological devices for wearable healthcare systems;
4. Optical and quantum MEMS devices and systems;
5. RF MEMS for telecommunication systems;
6. MEMS devices for self-powered systems;
7. Micro/nano fabrication process and integration;
8. MEMS packaging and reliability issues.

Dr. Tao Wu
Dr. Nan Wang
Dr. Jicong Zhao
Dr. Xiaoling Wei
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.