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2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope

1,2,†, 2,3,† and 1,2,3,*
1
Department of Biomedical Engineering, Michigan State University, East Lansing, MI 48823, USA
2
Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48823, USA
3
Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48823, USA
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Micromachines 2019, 10(5), 295; https://doi.org/10.3390/mi10050295
Received: 30 March 2019 / Revised: 22 April 2019 / Accepted: 26 April 2019 / Published: 30 April 2019
(This article belongs to the Special Issue Optical MEMS)
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Abstract

The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner performs 2D Lissajous pattern scanning with a large mechanical scanning angle (MSA, ±4°) on each axis at low driving voltage (36 V). A large field-of-view (FOV) has been achieved by using a post-objective scanning architecture of the confocal microscope. We have integrated the new MEMS scanner into a custom-made NIR fluorescence intraoperative confocal microscope with an outer diameter of 5.5 mm at its distal-end. Axial scanning has been achieved by using a piezoelectric actuator-based driving mechanism. We have successfully demonstrated ex vivo 2D imaging on human tissue specimens with up to five frames/s. The 2D resonant MEMS scanner can potentially be utilized for many applications, including multiphoton microendoscopy and wide-field endoscopy. View Full-Text
Keywords: resonant MEMS scanner; electrostatic; parametric resonance; NIR fluorescence; intraoperative microscope; 2D Lissajous; fluorescence confocal resonant MEMS scanner; electrostatic; parametric resonance; NIR fluorescence; intraoperative microscope; 2D Lissajous; fluorescence confocal
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Yao, C.-Y.; Li, B.; Qiu, Z. 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope. Micromachines 2019, 10, 295.

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