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Open AccessArticle

A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

1
Electrical Engineering Department, Technion—Israel Institute of Technology, Haifa 32000, Israel
2
Department of Electrical Engineering and Electronics, Ariel University, Ariel 40700, Israel
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(6), 587; https://doi.org/10.3390/mi11060587
Received: 10 May 2020 / Revised: 4 June 2020 / Accepted: 9 June 2020 / Published: 11 June 2020
This is a second part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. Part 1 focused on the chemical and technological aspects of the sensor. In part 2, the emphasis is on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The three main challenges in designing the hot plate are addressed: (i) How to design a hot plate operating in air, with a low thermal conductivity; (ii) how to measure the temperature of the hot plate during operation; (iii) how to reduce the total consumed power during operation. Reported simulated as well as analytical models and measured results are in good agreement. View Full-Text
Keywords: CMOS-SOI-MEMS gas sensor; catalytic micro hot-plate; thermal gas sensor; MEMS simulations and modeling CMOS-SOI-MEMS gas sensor; catalytic micro hot-plate; thermal gas sensor; MEMS simulations and modeling
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Avraham, M.; Stolyarova, S.; Blank, T.; Bar-Lev, S.; Golan, G.; Nemirovsky, Y. A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects. Micromachines 2020, 11, 587.

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