Special Issue "Silicon Micromachined Devices: Outlook and Challenges for Future Applications"
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (30 November 2017) | Viewed by 27575
Interests: MEMS; SiPho; sensors; microfluidics; material science; III/V semiconductors; biosensors
Interests: MEMS; MOEMS; optical sensors; interferometry; microphotonics; biophotonics; biosensors; lab on a chip
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We are very pleased to introduce this Special Issue on “Silicon Micromachined Devices: Outlook and Challenges for Future Applications.”
Silicon micromachined devices have immensely changed the way we are communicating, working and enjoying everyday life. Silicon micromachined accelerometers, gyroscopes, magnetometers, pressure sensors and microphones, just to name a few, are in everyone’s pocket and we use them every day. Micro actuators such as picoprojectors, micro-motors and print-heads for 3D printing are also emerging to further augment our everyday experience and expand developers’ possibilities in designing new IoT systems, such as virtual and augmented reality goggles, portable projectors and self-driving cars. Microfluidic devices will enable fully integrated Lab-on-Chip for point-of-care diagnostics and also smart thermal management of IT systems.
The key ingredients for this amazing success is the material, silicon, with its mechanical properties and features, together with the fabrication techniques originally developed for mass production of microelectronic integrated circuits.
However, what are the outlook and challenges for future developments and applications of silicon micromachined devices? In this Special Issue, we are inviting emerging and pioneer investigators to contribute research papers, short communications, and review articles that focus on novel methodological, technological and engineering developments in the area of silicon micromachined devices. The main idea is to stimulate contributions from both the academic and the industrial communities working in this exciting field, with the ambitious aim to provide a unique collection of insightful papers. We are looking forward to see academia and industry become ever more connected in order to further exploit silicon micromachined devices for improving our way of life and sustaining economic growth all over the world.
Contributions are solicited on the developments of new silicon micromachined devices and systems, such as sensors and actuators, silicon micromachined photonic devices, innovative design and new applications of silicon micromachined devices, as well as innovative techniques for characterization of silicon micromachined devices.
Prof. Sabina Merlo
Dr. Marco De Fazio
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- Silicon micromachined devices
- Si-based MEMS
- Si-based MOEMS
- Si-based sensors
- Si-based actuators
- Silicon micromachined photonic devices
- Innovative design of silicon micromachined devices
- Innovative techniques for characterization of silicon micromachined devices
- Applications of silicon micromachined devices