Ultra-sensitive inertial sensors are one of the key components in satellite Earth’s gravity field recovery missions and space gravitational wave detection missions. Low-noise capacitive position transducers are crucial to these missions to achi...
This paper proposes an improved method to calculate the mutual capacitance between interdigital transducer (IDT) electrodes to enhance the accuracy of the traditional coupling-of-modes (COM) model, which is commonly used to simulate surface acoustic...
Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream...
A smart capacitive transducer (SCT) for high-frequency vibration (HFV) measurements was developed, featuring self-calibration for the improvement of measurement accuracy. Measurements using this transducer are performed by positioning it over a thin...
The McKibben muscle types are pneumatic actuators known to be intrinsically safe for their high power-to-weight ratio. For these reasons, they are suitable for robotic, biomechanical, and medical applications. In these application fields and, above a...
Capacitive transducers are widely used in fundamental physics experiments, seismology, Earth or planetary observations, and space scientific and technical applications because of their high precision, simple structure, and compatibility with various...
An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS) based capacitive ultrasonic transducer and a linear array based on the transducer. Through directivity a...
Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with reado...
Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In th...
This paper presents the world’s first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-con...
We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This...
In a recent study using 3-D fullwave simulations, it was shown for a nonhuman primate model that a helmet-shaped 3D array of 128 transducer elements can be assembled for neurostimulation in an optimized configuration with the accommodation of an imag...
The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, an...
Photoacoustic imaging (PAI) is an emerging imaging technique that bridges the gap between pure optical and acoustic techniques to provide images with optical contrast at the acoustic penetration depth. The two key components that have allowed PAI to...
The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe...
The study of impedance matching between a transducer and its working medium is an important part of acoustic transducer design. The traditional quarter wavelength matching (Q-matching) scheme is not suitable for broadband capacitive micromachined ult...
This study investigates the effects of post-fabrication annealing on polymer-based capacitive micromachined ultrasonic transducers (polyCMUTs). These devices comprise microscopic diaphragms produced via photolithographic patterning of polymer layers....
Capacitive micromachined ultrasonic transducers (CMUTs) have been developed over the past 30 years and achieved practical applications in both medical imaging and industrial non-destructive testing. This article presents the fundamental principles of...
Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane work...
The signal-to-noise ratios (SNR) of ultrasonic imaging and non-destructive evaluation (NDE) applications can be greatly improved by driving each piezoelectric transducer (single or in array) with tuned HV capacitive-discharge drivers. These can deliv...
This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, fa...
This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an anal...
This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass...
This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and...
This article presents a low-cost, high-voltage excitation circuit (EC) for capacitive ultra-sonic transducers (CUTs) based on a dual-path architecture. The proposed design comprises two independent AC excitation channels (AC-branch) that share a regu...
Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded springs offer highly efficient output pressure performance over conventional CMUTs, owing to their nonflexural parallel plate movement. The embedded silicon springs suppo...
Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. Th...
This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs) by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key...
Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultrasonic transducers, while high bias voltage requirements and limited output pressure still need to be addressed. In this paper, we present a design for u...
Fan-out wafer-level packaging (FOWLP) is an interesting platform for Microelectromechanical systems (MEMS) sensor packaging. Employing FOWLP for MEMS sensor packaging has some unique challenges, while some originate merely from the fabrication of red...
Polyvinilidene fluoride (PVDF) single-element transducers for high-frequency (> 30 MHz) ultrasound imaging applications have been developed using MEMS (Micro-electro-Mechanical Systems) compatible techniques. Performance of these transducers has been...
A dual-frequency ultrasound transducer (DFUT) is usually preferred for its numerous advantageous applications, especially in biomedical imaging and sensing. However, most of DFUTs are based on the combination of fundamental and harmonic operations, o...
In this paper, a modular electromagnetic transducer that achieves the optimal transfer of energy from the electric and/or magnetic fields is proposed. Both the magnetic field resonance coupling and the influence of the electric field near the copper...
This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based spring-mass sensing element. The displacement changes of the proof mass are sensed by an area-variation-based capacitive displacement transducer that is formed...
Capacitive MEMS accelerometers with area-variable periodic-electrode displacement transducers found wide applications in disaster monitoring, resource exploration and inertial navigation. The bonding-induced warpage, due to the difference in the coef...
Hexagonal distributed embedded energy converters, also known as hexDEECs, are centimeter-scale energy transducers that leverage variable capacitance to generate electricity when their hyperelastic structure is dynamically deformed. To better understa...
In many monitoring scenarios, repeated and operator-independent assessments are needed. Wearable ultrasound technology has the potential to continuously provide the vital information traditionally obtained from conventional ultrasound scanners, such...
Pull-in effect is a common phenomenon during anodic bonding, a key step in the
fabrication processes of capacitive sensors and actuators. To assist the designs and fabrications of
these transducers, this paper presents an analytical method for modellin...
This study proposes a parameter optimization method for identifying the optimal nonlinear parameters of a miniature transducer with a metal membrane. Specifically, a nonlinear lumped parameter model (LPM) of a miniature transducer that accounts for p...
Recently, capacitive micromachined ultrasound transducers (CMUTs) with long rectangular membranes have demonstrated performance advantages over conventional piezoelectric transducers; however, modeling these CMUT geometries has been limited to comput...
This paper reports on the construction and characterization of an optical voltage transducer module for applications in the field of wide-area monitoring, protection, and control (WAMPAC). The optical medium voltage transducer (MVT) module was design...
This paper reports on the design, implementation, and characterization of a current-mode analog-front-end circuit for capacitance-to-voltage conversion that can be used in connection with a large variety of sensors and actuators in industrial and reh...
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration...
This paper reports on the performance of an optical voltage transducer (MVT) module after undergoing lightning impulse withstand tests. The device was designed to monitor the output voltage of a dedicated capacitive voltage divider (CVD) to facilitat...
Due to sensor size and supporting circuitry, in-vivo load and deformation measurements are currently restricted to applications within larger orthopaedic implants. The objective of this study is to repurpose a commercially available low-power, miniat...
An emerging alternative to conventional piezoelectric technologies, which continue to dominate the ultrasound medical imaging (US) market, is Capacitive Micromachined Ultrasonic Transducers (CMUTs). Ultrasound transducers based on this technology off...
A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission per...
Compared with traditional piezoelectric transducers, Capacitive Micromachined Ultrasonic Transducers (CMUTs) have advantages such as better impedance matching with air, smaller size, lighter weight, higher sensitivity, and ease of array formation. Ac...
The advantages of the capacitive micromachined ultrasound transducer (CMUT) technology have provided revolutionary advances in ultrasound imaging. Extensive research on CMUT devices for high-frequency medical imaging applications has been conducted b...
Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotationa...
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