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Open AccessReview

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review

Kaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, Lithuania
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Sensors 2020, 20(12), 3554; https://doi.org/10.3390/s20123554
Received: 4 May 2020 / Revised: 10 June 2020 / Accepted: 20 June 2020 / Published: 23 June 2020
(This article belongs to the Special Issue Modeling, Development and Applications of Novel Ultrasound Sensors)
This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed. View Full-Text
Keywords: Capacitive Micromachined Ultrasound Transducer; gas sensing; molecule sensing; Micro Electro Mechanical System; microfabrication; finite element modeling Capacitive Micromachined Ultrasound Transducer; gas sensing; molecule sensing; Micro Electro Mechanical System; microfabrication; finite element modeling
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MDPI and ACS Style

Barauskas, D.; Dzikaras, M.; Bieliauskas, D.; Pelenis, D.; Vanagas, G.; Viržonis, D. Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review. Sensors 2020, 20, 3554. https://doi.org/10.3390/s20123554

AMA Style

Barauskas D, Dzikaras M, Bieliauskas D, Pelenis D, Vanagas G, Viržonis D. Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review. Sensors. 2020; 20(12):3554. https://doi.org/10.3390/s20123554

Chicago/Turabian Style

Barauskas, Dovydas; Dzikaras, Mindaugas; Bieliauskas, Dovydas; Pelenis, Donatas; Vanagas, Gailius; Viržonis, Darius. 2020. "Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review" Sensors 20, no. 12: 3554. https://doi.org/10.3390/s20123554

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