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Advances in Capacitive Micromachined Ultrasonic Transducers

E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
Department of Electrical and Electronics Engineering, TOBB University of Economics and Technology, Ankara 06560, Turkey
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Micromachines 2019, 10(2), 152;
Received: 15 January 2019 / Revised: 13 February 2019 / Accepted: 18 February 2019 / Published: 23 February 2019
(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
PDF [5515 KB, uploaded 26 February 2019]
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Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging. View Full-Text
Keywords: capacitive micromachined ultrasonic transducer (CMUT); acoustics; micromachining; capacitive; transducer; modelling; fabrication capacitive micromachined ultrasonic transducer (CMUT); acoustics; micromachining; capacitive; transducer; modelling; fabrication

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Brenner, K.; Ergun, A.S.; Firouzi, K.; Rasmussen, M.F.; Stedman, Q.; Khuri–Yakub, B.P. Advances in Capacitive Micromachined Ultrasonic Transducers. Micromachines 2019, 10, 152.

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