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Advances in Capacitive Micromachined Ultrasonic Transducers

1
E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
2
Department of Electrical and Electronics Engineering, TOBB University of Economics and Technology, Ankara 06560, Turkey
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Micromachines 2019, 10(2), 152; https://doi.org/10.3390/mi10020152
Received: 15 January 2019 / Revised: 13 February 2019 / Accepted: 18 February 2019 / Published: 23 February 2019
(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
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Abstract

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging. View Full-Text
Keywords: capacitive micromachined ultrasonic transducer (CMUT); acoustics; micromachining; capacitive; transducer; modelling; fabrication capacitive micromachined ultrasonic transducer (CMUT); acoustics; micromachining; capacitive; transducer; modelling; fabrication
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Brenner, K.; Ergun, A.S.; Firouzi, K.; Rasmussen, M.F.; Stedman, Q.; Khuri–Yakub, B.P. Advances in Capacitive Micromachined Ultrasonic Transducers. Micromachines 2019, 10, 152.

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