MEMS Ultrasonic Transducers, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 28 February 2026 | Viewed by 477

Special Issue Editor


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Guest Editor
School of Materials Science and Intelligent Engineering, Nanjing University, Suzhou 215163, China
Interests: micro high-frequency transducer; micromachined piezocomposite; ultrasound equipment development; biomedical ultrasound imaging and therapy and wearable sensors
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Special Issue Information

Dear Colleagues,

Ultrasonic transducers are widely used in medical imaging, industrial non-destructive testing, ultrasonic microscopes, ultrasonic radars, underwater ultrasound, ultrasonic measurement, and other fields. Due to the disadvantages of traditional ultrasonic transducers based on bulk piezoelectric materials, such as large size, difficult processing, low bandwidth, high frequency, and high cost for array probes, their application in many fields is limited. In response to the above urgent needs, MEMS technology has injected new impetus into the development and application of ultrasonic transducers and realized a high-performance miniature ultrasonic transducer array with low power consumption, miniaturization, and integrated integration while reducing the cost of mass production. MEMS ultrasonic transducers are expected to push the application of ultrasound technology to a new level, realizing its application in emerging fields such as smartphones, automotive electronics, smart homes, autonomous driving, robotics, and medical devices, including ultrasound fingerprint recognition sensors, human–computer interaction, ultrasound imaging devices for home diagnosis, and ultrasound wearable devices.

In this Special Issue, original research articles and reviews are welcome. Research areas may include (but not limited to) the following:

  1. Piezoelectric micromachined ultrasonic transducers (PMUT).
  2. Capacitive micromachined ultrasonic transducers (CMUT).
  3. Micromachined ultrasonic transducers.
  4. Thin-film transducers.
  5. MEMS vector hydrophones.
  6. MEMS pressure sensors.
  7. MEMS transducer structure design and simulation.
  8. Micromachined 1-3 piezocomposite.
  9. Applications of MEMS transducers.

We look forward to receiving your contributions.

Prof. Dr. Xiaohua Jian
Guest Editor

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Keywords

  • PMUT
  • CMUT
  • miniature ultrasound transducers
  • thin-film transducer
  • hydrophone
  • ultrasound imaging
  • ultrasound testing
  • wearable ultrasound

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Published Papers (1 paper)

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Research

14 pages, 3931 KB  
Article
Design and Fabrication of Air-Coupled CMUT for Non-Contact Temperature Measurement Applications
by Xiaobo Rui, Yongshuai Ma, Chenghao He, Chi Zhang, Zhuochen Wang and Hui Zhang
Micromachines 2025, 16(9), 1008; https://doi.org/10.3390/mi16091008 - 31 Aug 2025
Viewed by 327
Abstract
Compared with traditional piezoelectric transducers, Capacitive Micromachined Ultrasonic Transducers (CMUTs) have advantages such as better impedance matching with air, smaller size, lighter weight, higher sensitivity, and ease of array formation. Acoustic temperature measurement is a technology that utilizes the relationship between sound velocity [...] Read more.
Compared with traditional piezoelectric transducers, Capacitive Micromachined Ultrasonic Transducers (CMUTs) have advantages such as better impedance matching with air, smaller size, lighter weight, higher sensitivity, and ease of array formation. Acoustic temperature measurement is a technology that utilizes the relationship between sound velocity and temperature to achieve non-contact temperature detection, with advantages such as fast response and non-invasiveness. CMUT-based acoustic temperature field measurement can achieve temperature detection in situations with narrow spaces, portability, and high measurement accuracy. This paper investigates an air-coupled CMUT device for acoustic temperature measurement, featuring a resonant frequency of 220 kHz, and composed of 16 × 8 cells. The design and fabrication of the CMUT array were completed, and the device characteristics were tested and characterized. A temperature field measurement method using mechanical scanning was proposed. A temperature measurement experimental system based on CMUT devices was constructed, achieving preliminary measurement of acoustic transmission time in both uniform and non-uniform temperature fields. Using a temperature field reconstruction algorithm, the measurement and imaging of the temperature field above an electric heating wire were accomplished and compared with the thermocouple-based temperature measurement experiment. The experimental results verified the feasibility of CMUT devices for non-contact temperature field measurement. Full article
(This article belongs to the Special Issue MEMS Ultrasonic Transducers, 2nd Edition)
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