- Article
Control Strategy for Power Conversion Systems in Plasma Generators with High Power Quality and Efficiency Considering Entire Load Conditions
- Hyo Min Ahn,
- Eunsu Jang,
- Seung-Hee Ryu,
- Chang Seob Lim and
- Byoung Kuk Lee
In this paper, a control method for the power conversion system (PCS) of plasma generators connected with a plasma chamber has been presented. The PCS generates the plasma by applying a high magnitude and high frequency voltage to the injected gasses...