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Control Strategy for Power Conversion Systems in Plasma Generators with High Power Quality and Efficiency Considering Entire Load Conditions

1
Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Korea
2
R&D Center, New Power Plasma, CO., LTD., Pyeongtaek 17703, Korea
*
Author to whom correspondence should be addressed.
Energies 2019, 12(9), 1723; https://doi.org/10.3390/en12091723
Received: 2 April 2019 / Revised: 26 April 2019 / Accepted: 2 May 2019 / Published: 7 May 2019
(This article belongs to the Special Issue Plasma Processes for Renewable Energy Technologies)
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Abstract

In this paper, a control method for the power conversion system (PCS) of plasma generators connected with a plasma chamber has been presented. The PCS generates the plasma by applying a high magnitude and high frequency voltage to the injected gasses, in the chamber. With regards to the PCS, the injected gases in the chamber could be equivalent to the resistive impedance, and the equivalent impedance had a wide variable range, according to the gas pressure, amount of injected gases and the ignition state of gases in the chamber. In other words, the PCS for plasma generators should operate over a wide load range. Therefore, a control method of the PCS for plasma generators, has been proposed, to ensure stable and efficient operation in a wide load range. In addition, the validity of the proposed control method was verified by simulation and experimental results, based on an actual plasma chamber. View Full-Text
Keywords: plasma generator; high-frequency DC-AC inverter; input-parallel and output-series connected inverter; two-stage AC-AC converter plasma generator; high-frequency DC-AC inverter; input-parallel and output-series connected inverter; two-stage AC-AC converter
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Ahn, H.M.; Jang, E.; Ryu, S.-H.; Lim, C.S.; Lee, B.K. Control Strategy for Power Conversion Systems in Plasma Generators with High Power Quality and Efficiency Considering Entire Load Conditions. Energies 2019, 12, 1723.

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