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Open AccessArticle

A 2.4 GHz 20 W 8-channel RF Source Module with Solid-State Power Amplifiers for Plasma Generators

Department of Electronics and System Engineering, Hanyang University, Ansan 15588, Korea
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Author to whom correspondence should be addressed.
Electronics 2020, 9(9), 1378; https://doi.org/10.3390/electronics9091378
Received: 29 June 2020 / Revised: 18 August 2020 / Accepted: 24 August 2020 / Published: 26 August 2020
(This article belongs to the Special Issue New CMOS Devices and Their Applications)
This paper presents a novel multi-channel type RF source module with solid-state power amplifiers for plasma generators. The proposed module is consisted of a DC control part, RF source generation part, and power amplification part. A 2-stage power amplifier (PA) is combined with a gallium arsenide hetero bipolar transistor (GaAs HBT) as a drive PA and a gallium nitride high electron mobility transistor (GaN HEMT) as a main PA, respectively. By employing 8 channels, the proposed module secures better area coverage on the wafer during semiconductor processes such as chemical vapor deposition (CVD), etching and so on. Additionally, each channel can be maintained at a constant output power because they have a gain factor tunable by a variable gain amplifier (VGA). For that reason, it is possible to have uniform plasma density on the wafer. The operating sequence is controllable by an external DC control port. Moreover, copper–tungsten (CuW) heat spreaders were applied to prevent RF performance degradation from heat generated by the high power amplifier (HPA), and a water jacket was implemented at the bottom of the power amplification part for liquid cooling. Drawing upon the measurement results, the output power at each channel was over 43 dBm (20 W) and the drain efficiency was more than 50% at 2.4 GHz. View Full-Text
Keywords: GaAs HBT; GaN HEMT; multi-channels; plasma generator; power amplifier module; RF; solid-state power amplifier GaAs HBT; GaN HEMT; multi-channels; plasma generator; power amplifier module; RF; solid-state power amplifier
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Nam, H.; Sim, T.; Kim, J. A 2.4 GHz 20 W 8-channel RF Source Module with Solid-State Power Amplifiers for Plasma Generators. Electronics 2020, 9, 1378.

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