Piezoelectric microelectromechanical system (MEMS) loudspeakers have received extensive attention in recent years. In particular, the piezoelectric cantilever MEMS loudspeaker, which uses multilayer piezoelectric cantilever actuators (MPCAs), has att...
Piezoelectric MEMS devices were fabricated on 200 mm Si wafers using both deposited and layer-transferred PZT films. In both cases, the PZT-based devices showed ferroelectric and piezoelectric properties at the level of current state-of-the-art devic...
This paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...]
A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-sili...
To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flex...
This paper reports the design, fabrication and performance of Micro-electromechanical Systems (MEMS) piezoelectric bidirectional conveyors featuring 3D-printed legs in bridge resonators. The structures consisted of aluminium-nitride (AlN) piezoelectr...
With the global market value of sensors on the rise, this paper focuses on the fabrication and testing of a proof-of-concept piezoelectric energy harvester which is able to harvest mechanical energy from the ambient environment and convert it into el...
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particl...
Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plan...
This paper presents the thermal behavior of non-resonant (quasi-static) piezoelectric biaxial MEMS scanners with Bragg reflectors. These scanners were developed for LIDAR (LIght Detection And Ranging) applications using a pulsed 1550 nm laser with an...
The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode dr...
Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial p...
The nitrogen-vacancy (NV) center of the diamond has attracted widespread attention because of its high sensitivity in quantum precision measurement. The phonon piezoelectric device of the NV center is designed on the basis of the phonon-coupled regul...
Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their resonant frequency highly sensitive to variations in their mass induced by sur...
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed...
Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise...
Piezoelectric thin films have been widely used in micro-electromechanical systems (MEMSs), such as sensors, actuators, and resonant devices. Electromechanically driven fractures can severely degrade device performance and reliability. In this work, a...
A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study...
Conventionally designed piezoelectric micro-electro-mechanical systems (MEMS) speakers with thin-film-type, piston-type, and cantilever-type vibration membranes still adopt a Si supporting layer, which not only hinders the improvement of sound pressu...
A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode (A0) of Lamb waves is presented. The 6 mm × 6 mm diaphragm used to sense the applied pressure is composed of a stack of doped silicon (Si) and aluminum ni...
This work demonstrates lab-scale monitoring of the dynamic viscosity of bitumen with piezoelectric MEMS resonators over a period of 120 h at an elevated temperature of 100 °C in air. The aluminium nitride-based MEMS resonator is excited in a high...
This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical...
This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN)...
This paper presents the development of a lab-on-chip system based on the use of local vibrations to mechanically stimulate biological materials. It reports on the development and characterization of a piezoelectric actuators driven system designed to...
This paper introduces a novel nondestructive wafer scale thin film thickness measurement method by detecting the reflected picosecond ultrasonic wave transmitting between different interfacial layers. Unlike other traditional approaches used for thic...
In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both the sample without a top electrode and anoth...
In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scann...
We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top elect...
The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantileve...
In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functio...
The increasing interest in the Internet of Things (IoT) has led to the rapid development of low-power sensors and wireless networks. However, there are still several barriers that make a global deployment of the IoT difficult. One of these issues is...
This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a d...
In this paper, a multi-material radial phononic crystal (M-RPC) structure is proposed to reduce the anchor-point loss of piezoelectric micro-electro-mechanical system (MEMS) resonators and improve their quality factor. Compared with single-material p...
This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainl...
For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures includin...
Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully...
One of the main difficulties for a global implantation of the Internet of Things (IoT) is the energy dependence of the nodes, limited by the battery’s lifetime. Energy harvesting seems to be a promising solution to provide energy autonomy to IoT node...
In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including...
This work presents a novel, highly sensitive, and directional piezoelectric cantilever-based micro-electro-mechanical system (MEMS) device conceived using a biomimetic approach of a fish’s lateral line system for marine sensing robotics. The de...
Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection...
Metasurfaces have emerged as a powerful platform for subwavelength light manipulation, attracting widespread interest for their potential to replace bulky optical components. However, most metasurfaces are statically designed with fixed functionaliti...
The present work presents an innovative marine sensing robotics device based on piezoelectric cantilever-integrated micro-electro-mechanical systems (MEMSs) modeled on fish lateral lines. The device comprises 12 cantilevers of different shapes and si...
In this study grape must fermentation is monitored using a self-actuating/self-sensing piezoelectric micro-electromechanical system (MEMS) resonator. The sensor element is excited in an advanced roof tile-shaped vibration mode, which ensures high Q-f...
This paper presents the fabrication and characterization of a biaxial MEMS (MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which incorporates a low-absorption dielectric multilayer coating, i.e., a Bragg reflector. Thes...
In response to the pressing need for miniaturized MEMS microphones in wearable technology and mobile devices, and to surmount the technical limitations inherent in conventional piezoelectric microphones, which typically depend on enlarging chip dimen...
In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and reso...
This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating...
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC...
In this study we propose a piezoelectric MEMS vibration energy harvester with the capability of oscillating at low (i.e., less than 200 Hz) resonant frequency. The mechanical structure of the proposed harvester is comprised of a doubly clamped cantil...
The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution and high output power density, so it has become a research hotspot of th...
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