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Open AccessArticle

Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

School of Mechatronic Engineering, Beijing Institute of Technology, Beijing 100081, China
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Materials 2020, 13(10), 2330; https://doi.org/10.3390/ma13102330
Received: 16 April 2020 / Revised: 11 May 2020 / Accepted: 15 May 2020 / Published: 19 May 2020
(This article belongs to the Special Issue Smart Materials and Devices for Energy Harvesting)
For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis. View Full-Text
Keywords: double-clamped; width shapes; piezoelectric energy harvester; electrodes pair; MEMS structure double-clamped; width shapes; piezoelectric energy harvester; electrodes pair; MEMS structure
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MDPI and ACS Style

Jin, L.; Gao, S.; Zhang, X.; Wu, Q. Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes. Materials 2020, 13, 2330.

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