Next Article in Journal
Single and Multi-Objective Optimization of a Three-Dimensional Unbalanced Split-and-Recombine Micromixer
Previous Article in Journal
Fabrication of 512-Channel Geometrical Passive Breakup Device for High-Throughput Microdroplet Production
Previous Article in Special Issue
A Misalignment Optical Guiding Module for Power Generation Enhancement of Fixed-Type Photovoltaic Systems
Open AccessArticle

A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor

by Po-Chen Yeh 1, Hao Duan 1 and Tien-Kan Chung 1,2,*
1
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan
2
International College of Semiconductor Technology, National Chiao Tung University, Hsinchu 30010, Taiwan
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(10), 710; https://doi.org/10.3390/mi10100710
Received: 20 August 2019 / Revised: 13 October 2019 / Accepted: 16 October 2019 / Published: 20 October 2019
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO2 insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mVrms/Oe, 0.156 mVrms/Oe, and 0.035 mVrms/Oe, respectively, for sensing element A and 0.033 mVrms/Oe, 0.044 mVrms/Oe, and 0.130 mVrms/Oe, respectively, for sensing element B. View Full-Text
Keywords: MEMS; magnetic field sensor; AC; three-axial; piezoelectric MEMS; magnetic field sensor; AC; three-axial; piezoelectric
Show Figures

Figure 1

MDPI and ACS Style

Yeh, P.-C.; Duan, H.; Chung, T.-K. A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor. Micromachines 2019, 10, 710.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop