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Proceedings 2017, 1(4), 386;

Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications

University Grenoble Alpes, F-38000 Grenoble, France
CEA-LETI, MINATEC Campus, 38054 Grenoble, France
INSERM U1205 Team ATIP/Avenir Mechanobiology Innate Immunity and Cancer, 38054 Grenoble, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 9 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [975 KB, uploaded 14 August 2017]


This paper presents the development of a lab-on-chip system based on the use of local vibrations to mechanically stimulate biological materials. It reports on the development and characterization of a piezoelectric actuators driven system designed to operate in liquid media. The microfluidic packaging of the Micro Electro Mechanical System (MEMS) is first presented. Then, electromechanical measurements done to calibrate our system are compared with Finite Element Method (FEM) simulations. These results are the first steps for implementation of piezoelectric MEMS to study mechanical response of biological cells at the population level.
Keywords: MEMS; piezoelectric actuators; microfluidic; biological applications MEMS; piezoelectric actuators; microfluidic; biological applications
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Neff, B.; Casset, F.; Millet, A.; Agache, V.; Verplanck, N.; Boizot, F.; Fanget, S. Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications. Proceedings 2017, 1, 386.

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