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Micromachines
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Acoustic Transducers and Their Applications, 3rd Edition
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Acoustic Transducers and Their Applications, 3rd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 30 May 2026 | Viewed by 5444

Special Issue Editors

Dr. Songsong Zhang

E-Mail Website
Guest Editor
School of Microelectronics, Shanghai University, Shanghai 200444, China
Interests: piezoelectric material; MEMS device process; piezoelectric transducer design; acoustic sensing model; acoustic device algorithm and system-level application
Dr. Qiaozhen Zhang

E-Mail Website
Guest Editor
College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China
Interests: intelligent sensing technology and system; RF micro-acoustic devices for mobile communication; modeling and simulation of piezoelectric thin-film micro-acoustic devices
Special Issues, Collections and Topics in MDPI journals
Dr. Liang Lou

E-Mail Website
Guest Editor
School of Microelectronics, Shanghai University, Shanghai 200444, China
Interests: piezoelectric material and devices; MEMS; acoustic transducer; acoustic sensor
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Acoustics represent a key form of mechanical energy that is exerted everywhere in our world. It aids in sensing, actuating, and communicating, even in medical or industrial matters. With a broad operating spectrum, it is the most pivotal tool in various implementations, ranging from airborne applications to studies through different media, especially for needs beyond the physical limitations of other mechanisms (e.g., optical or electromagnetic waves). Alongside the progression of advanced transducer technology, more acoustic device alternatives have been optimized for conventional applications. In addition, consistent research efforts in the field of developing transducers enable rapid paradigmatic shifts in many emerging acoustic applications, which coherently accelerate the development of other peripheral technologies, such as thin-film materials used in acoustic transducers, circuits for acoustic devices, modules, algorithms, system integration, and even the integration of acoustic sensors into smart systems. In order to promote research efforts and advocate for continuous innovation in this field, in this Special Issue, the current state of the art in the field of ‘acoustic transducers and their applications’ will be presented, covering a wide range of related topics, including, but not limited to, the following:

  • New piezoelectric materials: ceramics, thin films, single crystals, polymers, composites, 2D materials, etc.;
  • Acoustic transducers: acoustic sensors and actuators, circuits for acoustic devices, modules, algorithms, and integrated systems;
  • Piezoelectric devices/acoustic transducers: fabrication, testing, characterization, design, modeling, simulation, manufacturing, 3D printing, packaging, and system integration;
  • Acoustic transducer applications: non-destructive testing, acoustic arrays for holography and beam steering, acoustic ranging, acoustic lenses, metamaterials and metasurfaces, energy harvesting, medical imaging, wearable sensors, biomedical applications, virtual reality/augmented reality, and other emerging applications for the metaverse.

Dr. Songsong Zhang
Dr. Qiaozhen Zhang
Dr. Liang Lou
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • acoustic transducers and their design, simulation, testing, and characterization
  • piezoelectric MEMS device
  • thin-film piezoelectric materials and material properties
  • MEMS integration process
  • acoustic modules, algorithms, circuits, and systems
  • acoustic lenses and meta-surfaces
  • acoustic transducer arrays and their applications
  • implementation and usage of acoustic devices for various applications

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Related Special Issue

Published Papers (6 papers)

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Research

12 pages, 2471 KB  
Article
Design and Implementation of Miniaturized Low-Frequency Flexibility-Enhanced Rotating Cantilever Beam Piezoelectric MEMS Microphone
by Bingchen Wu, Gong Chen, Changzhi Zhong and Tao Wang
Micromachines 2026, 17(4), 488; https://doi.org/10.3390/mi17040488 - 17 Apr 2026
Viewed by 438
Abstract
In response to the pressing need for miniaturized MEMS microphones in wearable technology and mobile devices, and to surmount the technical limitations inherent in conventional piezoelectric microphones, which typically depend on enlarging chip dimensions or decreasing stiffness to attain low resonance frequencies, this [...] Read more.
In response to the pressing need for miniaturized MEMS microphones in wearable technology and mobile devices, and to surmount the technical limitations inherent in conventional piezoelectric microphones, which typically depend on enlarging chip dimensions or decreasing stiffness to attain low resonance frequencies, this study introduces a novel piezoelectric MEMS microphone (PMM) design predicated on a flexibility-enhanced rotating structure. The proposed design utilizes an aluminum scandium nitride (Al0.8Sc0.2N) piezoelectric thin film with 20% scandium doping and incorporates four equivalent sensing units formed by four curved cutting lines centrally located on the chip. This configuration employs a nested arrangement of four cantilever beams to substantially increase vibration compliance, thereby effectively lowering the natural frequency without altering the chip’s external size. Three-dimensional finite element simulations reveal that, relative to traditional triangular cantilever beam architectures, the flexibility-enhanced rotating structure reduces the natural frequency from 15.6 kHz to 13.49 kHz while enhancing sensitivity from −44.6 dB to −40 dB. The device was fabricated via a comprehensive microfabrication process and subsequently characterized within a standardized acoustic testing environment. Experimental results indicate that the microphone attains a sensitivity of −43.84 dB at 1 kHz and exhibits a first resonance frequency of 13.5 kHz, closely aligning with simulation predictions. Furthermore, the signal-to-noise ratio (SNR) reaches 58.3 dB across the full range of human-audible frequencies. By leveraging the flexibility-enhanced rotating structure, this work achieves an optimal compromise between elevated sensitivity and reduced resonance frequency within a compact form factor, thereby offering a viable technical solution for the advancement of high-performance miniature acoustic sensors. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 3rd Edition)
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16 pages, 3782 KB  
Article
Underwater Acoustic Target Detection Using a Miniaturized MEMS Hydrophone Array
by Xiao Chen and Ying Zhang
Micromachines 2026, 17(4), 468; https://doi.org/10.3390/mi17040468 - 12 Apr 2026
Viewed by 437
Abstract
Sonar is a fundamental tool for underwater target detection. However, conventional detection systems often suffer from poor sensor consistency and high fabrication costs. More critically, for low-frequency operation, the required array aperture becomes prohibitively large, limiting their deployment on small, mobile underwater platforms. [...] Read more.
Sonar is a fundamental tool for underwater target detection. However, conventional detection systems often suffer from poor sensor consistency and high fabrication costs. More critically, for low-frequency operation, the required array aperture becomes prohibitively large, limiting their deployment on small, mobile underwater platforms. To address the demand for compact, high-performance sensing solutions, this paper presents a miniaturized Micro-electromechanical Systems (MEMS) hydrophone array designed for underwater target detection. The array consists of six elements with a spacing of 0.25 m. Each element is approximately 22 mm in diameter and encapsulated in polyurethane via a casting and curing process. The core sensing element, a MEMS acoustic pressure hydrophone, exhibits a sensitivity of −177.2 ± 1.5 dB (re: 1 V/µPa) across the 20 Hz to 4 kHz frequency range and a noise resolution of approximately 59.5 dB (re: 1 µPa/√Hz) at 1 kHz. A key challenge in array-based detection is the phase mismatch among acquisition channels, which degrades algorithm performance. To mitigate this, we propose a phase self-correction method based on interleaved ADC acquisition control, enabling synchronous multi-channel sampling and effectively eliminating system-level phase errors. Furthermore, to overcome the inherent aperture limitations of conventional beamforming (CBF) applied to a miniaturized array, a differential beamforming (DBF) algorithm is adopted. This approach is less frequency-dependent and can approximate a frequency-invariant beam pattern, making it well-suited for miniaturized arrays. Simulation results confirm the theoretical validity of the DBF algorithm for the proposed MEMS hydrophone array. Sea trial data further demonstrate that this method achieves higher target detection accuracy compared to CBF techniques. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 3rd Edition)
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20 pages, 9096 KB  
Article
Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter
by Shanfeng Hou, Xueying Xiu, Chengguang Liu, Haochen Lyu and Songsong Zhang
Micromachines 2026, 17(2), 254; https://doi.org/10.3390/mi17020254 - 16 Feb 2026
Viewed by 1469
Abstract
To mitigate acoustic beam drift, which degrades the signal-to-noise ratio (SNR) and limits the measurement range in ultrasonic gas flowmeters (USFMs), we present a miniaturized transit-time USFM that integrates a single piezoelectric micromachined ultrasonic transducer (PMUT) with a non-axisymmetric conical cavity. This design [...] Read more.
To mitigate acoustic beam drift, which degrades the signal-to-noise ratio (SNR) and limits the measurement range in ultrasonic gas flowmeters (USFMs), we present a miniaturized transit-time USFM that integrates a single piezoelectric micromachined ultrasonic transducer (PMUT) with a non-axisymmetric conical cavity. This design increases acoustic transmission gain and produces anisotropic directivity across orthogonal radiation planes, thereby broadening acoustic coverage along the flow direction and reducing beam steering. With an optimized cavity angle combination of (50°, 70°), the system achieves a 7.4 dB transmission gain and a half-power beamwidth (HPBW) of 29.1°. Experimental validation demonstrates a sound pressure attenuation of only 0.72 dB at 18.74 m/s. Within the 0.06–12 m3/h flow range, the USFM exhibits indication errors of ±2% (<1 m3/h) and ±1.5% (≥1 m3/h), with repeatability below 0.5%. The performance meets the Class 1.5 accuracy standard specified in CJ/T 477-2015, offering an innovative solution for wide-range miniaturized gas flow measurement. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 3rd Edition)
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11 pages, 4164 KB  
Article
Glass-Based Half-Mode SIW Bandpass Filter with Negative Coupling Structure
by Chen Shi, Wenlei Li, Jihua Zhang, Zhihua Tao, Yong Li, Dongbin Wang, Shuang Li and Ting Liu
Micromachines 2026, 17(2), 219; https://doi.org/10.3390/mi17020219 - 6 Feb 2026
Viewed by 544
Abstract
This work presents a millimeter-wave half-mode substrate integrated waveguide filter with high selectivity, using through glass via technology. Compared to a traditional printed circuit board, the benefits of high precision and integration afforded by the glass-based process enable the substrate-integrated waveguide to be [...] Read more.
This work presents a millimeter-wave half-mode substrate integrated waveguide filter with high selectivity, using through glass via technology. Compared to a traditional printed circuit board, the benefits of high precision and integration afforded by the glass-based process enable the substrate-integrated waveguide to be employed at a higher operating frequency. A novel negative coupling structure is proposed for achieving a quasi-elliptic function response, and its coupling mechanism is investigated to explore the properties of the finite transmission zeros. The proposed coupling slots allow for flexible adjustment of the coupling between the half-mode substrate integrated waveguide cavities from positive to negative by modulating the corresponding geometrical parameters. As a prototype, a glass-based fourth-order bandpass filter is synthesized, simulated, fabricated and measured. Subsequently, good matching is captured, confirming the validity of the topology. The proposed glass-based negative coupling structure is promising for realizing substrate integrated waveguide filters with a quasi-elliptic function response, especially operating at millimeter-wave band. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 3rd Edition)
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19 pages, 2395 KB  
Article
Response Surface Methodology for Optimizing the Design Parameters of Ultrasonic Liquid-Level Measurement System
by Wanjia Gao, Wendong Zhang and Yue Tian
Micromachines 2025, 16(11), 1281; https://doi.org/10.3390/mi16111281 - 13 Nov 2025
Viewed by 801
Abstract
This study addresses the high-precision requirements for liquid-level detection of propellants in aerospace rockets and optimizes the design parameters of an ultrasonic liquid-level measurement system based on the response surface method (RSM). Meanwhile, a quantitative correlation model between multiple physical parameters and output [...] Read more.
This study addresses the high-precision requirements for liquid-level detection of propellants in aerospace rockets and optimizes the design parameters of an ultrasonic liquid-level measurement system based on the response surface method (RSM). Meanwhile, a quantitative correlation model between multiple physical parameters and output voltage is established through theoretical derivation. Firstly, the effects of piezoelectric ceramic sheet diameter, ultrasonic frequency, excitation voltage and liquid temperature on the output voltage are investigated. The optimum conditions were obtained by one-way tests, where the output voltage reached its maximum when the diameter of the piezoelectric ceramic sheet was 15 mm and the frequency was 1 MHz. The excitation voltage was positively correlated with the output voltage. Elevated liquid temperature enhanced the echo amplitude. The influence of law remained consistent across different liquid levels. Subsequently, under the liquid level of 12 cm (half-full operating condition), a three-factor, three-level response surface methodology (RSM) analysis experiment was conducted, focusing on three factors that significantly affect energy transfer efficiency: piezoelectric ceramic sheet diameter (D), ultrasonic frequency (f), and liquid temperature (T). The best parameter combination was obtained through model optimization: D = 14.773 mm, f = 0.878 MHz, T = 33.661 °C. The predicted U-value was 8.976 V. The validation experiments demonstrated that the error rates between the measured average voltage values and the predicted values under different liquid levels were all <1%, and the coefficient of variation (CV) of the output signal was reduced to 0.9%. This not only meets the error requirements for aerospace liquid-level measurement but also verifies the reliability of the optimized model. This study significantly enhances the output signal stability and measurement accuracy, providing support for the liquid-level detection of aerospace propellants and high-precision liquid-level measurement in industrial applications. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 3rd Edition)
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15 pages, 5309 KB  
Article
Study on the Loss and Characteristics of Giant Magnetostrictive Transducers
by Qiang Liu, Xiping He, Weiguo Wang and Yanning Yang
Micromachines 2025, 16(9), 982; https://doi.org/10.3390/mi16090982 - 26 Aug 2025
Viewed by 1176
Abstract
The purpose of this work is to enable the giant magnetostrictive transducer to work efficiently. In this work, the finite element method was used to carry out a dynamic analysis and magnetic analysis of the transducers of GMM rods with different structures, and [...] Read more.
The purpose of this work is to enable the giant magnetostrictive transducer to work efficiently. In this work, the finite element method was used to carry out a dynamic analysis and magnetic analysis of the transducers of GMM rods with different structures, and the transducers of three structural rods were developed, and the output amplitude and impedance of the three transducers were experimentally tested. The results show that the stress of the rod near the end of the tail mass was larger than that near the end of the head mass. The eddy current and hysteresis losses of the transducer were mainly concentrated on the outer diameter surface of the rod, near the cutting slit, and near the connection between the slices. In addition, there is a certain amount of eddy current loss on the magnetic conductor, permanent magnet, and coil. In the transducer with the untreated rod, the resistance and inductance were the smallest. The inductance of the transducers with the sliced rods were greater than those in the transducers with the slit rods. The transducer with the untreated rod has the highest resonant frequency and the smallest output amplitude, the resonant frequency of the transducers with the sliced rods was lower than that of the transducers with the slit rods, while the output amplitude of the transducers with the sliced rods was greater than that of the transducers with the slit rods. The simulated values of the resonant frequency, output amplitude, resistance, and inductance of the transducers of the three structural rods were basically consistent with the tested values. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 3rd Edition)
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