Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency
Abstract
:1. Introduction
2. Fabrication Technology and Device Design
3. Finite Element Analysis of the Piezoelectric MEMS Device
4. Experimental Results
5. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Nastro, A.; Ferrari, M.; Rufer, L.; Basrour, S.; Ferrari, V. Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency. Micromachines 2022, 13, 96. https://doi.org/10.3390/mi13010096
Nastro A, Ferrari M, Rufer L, Basrour S, Ferrari V. Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency. Micromachines. 2022; 13(1):96. https://doi.org/10.3390/mi13010096
Chicago/Turabian StyleNastro, Alessandro, Marco Ferrari, Libor Rufer, Skandar Basrour, and Vittorio Ferrari. 2022. "Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency" Micromachines 13, no. 1: 96. https://doi.org/10.3390/mi13010096