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Open AccessArticle

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Department of Engineering, University of Cambridge, Cambridge CB2 1PZ, UK
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Author to whom correspondence should be addressed.
Sensors 2020, 20(11), 3162; https://doi.org/10.3390/s20113162
Received: 29 April 2020 / Revised: 27 May 2020 / Accepted: 30 May 2020 / Published: 2 June 2020
(This article belongs to the Special Issue Micro-Machined Thin-Film Piezoelectric Sensors)
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists for diesel soot particles originating from combustion engines, as they are of serious health concern. The MEMS sensors employed in this work operate on the principle of vibration mode-localisation employing an amplitude ratio shift output metric for readout. Notably, gains are observed while comparing parametric sensitivities and the input referred stability for amplitude ratio and resonant frequency variations, demonstrating that the amplitude ratio output metric is particularly suitable for long-term measurements. The soot particle mass directly estimated using coupled MEMS resonators can be correlated to the mass, indirectly estimated using the condensation particle counter used as the reference instrument. View Full-Text
Keywords: particulate matter; soot particles; coupled MEMS resonators; amplitude ratio stability; frequency stability; amplitude ratio sensitivity; piezoelectric MEMS; Q factor particulate matter; soot particles; coupled MEMS resonators; amplitude ratio stability; frequency stability; amplitude ratio sensitivity; piezoelectric MEMS; Q factor
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MDPI and ACS Style

Chellasivalingam, M.; Imran, H.; Pandit, M.; Boies, A.M.; Seshia, A.A. Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing. Sensors 2020, 20, 3162. https://doi.org/10.3390/s20113162

AMA Style

Chellasivalingam M, Imran H, Pandit M, Boies AM, Seshia AA. Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing. Sensors. 2020; 20(11):3162. https://doi.org/10.3390/s20113162

Chicago/Turabian Style

Chellasivalingam, Malar; Imran, Hassan; Pandit, Milind; Boies, Adam M.; Seshia, Ashwin A. 2020. "Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing" Sensors 20, no. 11: 3162. https://doi.org/10.3390/s20113162

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