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Open AccessArticle

Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation

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School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 61173, China
2
Yingcai Honors College, University of Electronic Science and Technology of China, Chengdu 61173, China
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(9), 626; https://doi.org/10.3390/mi10090626
Received: 9 August 2019 / Revised: 13 September 2019 / Accepted: 18 September 2019 / Published: 19 September 2019
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (SW-PnC) is proposed to sufficiently isolate the wave vibration. Finite-element analysis is performed to gain insight into the transmission property of finite PnC, and band characteristics by infinite periods. In comparison with the circle hole PnC at a similar bandgap, due to its already very lightweight PnC structure compared with previously reported PnCs, the proposed PnC offers a significantly lighter weight, smaller lattice constant, and greater energy leakage inhibition. More specifically, the resonator with the SW-PnC plate as the anchoring substrate exhibited a quality factor as high as 66569.7 at 75.82 MHz. View Full-Text
Keywords: phononic crystals; piezoelectric; MEMS resonator; energy dissipation; finite-element-analysis; bandgap; transmission property; quality factor phononic crystals; piezoelectric; MEMS resonator; energy dissipation; finite-element-analysis; bandgap; transmission property; quality factor
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MDPI and ACS Style

Bao, F.-H.; Wu, X.-Q.; Zhou, X.; Wu, Q.-D.; Zhang, X.-S.; Bao, J.-F. Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation. Micromachines 2019, 10, 626.

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