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Open AccessArticle

A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism

1
School of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, China
2
Jiangxi Province Key Laboratory of Precision Drive & Control, Department of Mechanical and Electrical Engineering, Nanchang Institute of Technology, Nanchang 330099, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(10), 639; https://doi.org/10.3390/mi10100639
Received: 22 August 2019 / Revised: 19 September 2019 / Accepted: 20 September 2019 / Published: 24 September 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g−1·Hz−1·cm−3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario. View Full-Text
Keywords: MEMS; piezoelectric vibration energy harvester; frequency up-conversion mechanism; impact; PZT thick film MEMS; piezoelectric vibration energy harvester; frequency up-conversion mechanism; impact; PZT thick film
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MDPI and ACS Style

Huang, M.; Hou, C.; Li, Y.; Liu, H.; Wang, F.; Chen, T.; Yang, Z.; Tang, G.; Sun, L. A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism. Micromachines 2019, 10, 639.

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