MEMS Devices for Nanomanufacturing

Dear colleagues,

High-volume nanomanufacturing is a key technology driver crucial for the development of novel, high-performance, and low-cost miniaturized products with applications in several industries, such as microelectronics, energy, medical devices, etc. However, materials development and quality control of production in nanoscale have been two of the most difficult challenges due to new approaches required to produce and test nanomaterials in nanoscale. Developing materials for nanoscale applications requires higher precision in the placement and manipulation of the material. In addition, nanomaterial requires a more detailed analysis to find defects and to perform quality control, which only can be done by atomic level analysis equipment. These challenges can be effectively addressed with the development of application-specific MEMS and NEMS devices to fulfill the requirements of precision, scalability, process control, and metrology.

For this Special Issue, we invite you to contribute to the design, development, production, and testing of nanomaterials using MEMS devices for nanomanufacturing. The broader scope of the special issue will cover the spectrum of the nanomanufacturing process flow from start to end, manufacturing process design, novel production methods, nanomaterial testing using MEMS devices, and approaches to improve the scalability of the process from a high throughput environment.

Dr. Michael Cullinan
Dr. Joon Hyong Cho
Dr. Dipankar Behera
Dr. David Cayll
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

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