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Proceedings 2018, 2(13), 1512; https://doi.org/10.3390/proceedings2131512

Towards the Monolithic Integration of Converter Circuitry and Piezoelectric MEMS Energy Harvesters

1
Department of Micro and Nanoengineering, Instituto de Microelectrónica de Barcelona IMB-CNM (CSIC), Campus UAB Bellaterra, 08193 Barcelona, Spain
2
Postgrado en Nanotecnología, Universidad de Sonora (Unison), Hermosillo, 83000 Sonora, Mexico
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Authors to whom correspondence should be addressed.
Published: 7 December 2018
PDF [657 KB, uploaded 7 December 2018]

Abstract

One of the main difficulties for a global implantation of the Internet of Things (IoT) is the energy dependence of the nodes, limited by the battery’s lifetime. Energy harvesting seems to be a promising solution to provide energy autonomy to IoT nodes. Power management circuits are needed to collect and store the charges scavenged form the ambient sources. In addition, this circuit needs to adapt the output voltage to power the wireless sensor node. Because of the typical heterogeneity of the system, the cost and difficulties associated to the encapsulation of the CMOS chip and the energy harvester can be important. They could be reduced by using a monolithic integration of both parts in a single chip or package. In this work, we propose a fully monolithically integrated system comprised by a power management circuit, a piezoelectric microgenerator and a storage capacitor. With this solution, which combines MEMS and CMOS technologies, we pave the way to the future development of autonomous smart dust.
Keywords: IoT; MEMS; energy harvesting; monolithic integration; piezoelectric; CMOS; charge pump; self-powered; AlN IoT; MEMS; energy harvesting; monolithic integration; piezoelectric; CMOS; charge pump; self-powered; AlN
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Duque, M.; Leon-Salguero, E.; Sacristán, J.; Esteve, J.; Murillo, G. Towards the Monolithic Integration of Converter Circuitry and Piezoelectric MEMS Energy Harvesters. Proceedings 2018, 2, 1512.

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